Optical Profiler offers Dynamic MEMS measurement option.

Press Release Summary:

Wyko® NT1100 characterizes micro-devices in 3D as they actuate for assessment of true device functionality and measurement of in- and out-of-plane dimensions. System offers dynamic and static measurement of rough surfaces on one platform. Non-contact, white light interferometry provides Angstrom-resolution measurement of features from 0.1-2 mm in height. System includes custom illumination source, electronics, and template-driven SureVision(TM) software.

Original Press Release:

Veeco Introduces New Dynamic MEMS Measurement with Wyko Optical Profiler

High Accuracy Static and Dynamic MEMS Metrology on a Single Platform

Tucson, AZ, January 14, 2002-Veeco Metrology Group has introduced the Dynamic MEMS (DMEMS) measurement option for its Wyko® NT1100 optical profilers. The DMEMS option adds the capability to characterize micro-devices in 3D as they actuate, for assessment of true device functionality and measurement of in- and out-of-plane dimensions. The DMEMS-equipped NT1100 is the first system to offer both dynamic measurement and static, white light profiling of rough surfaces and large steps, for complete MEMS metrology on a single platform.

"The DMEMS option creates the most capable MEMS metrology package available," said Anthony Martinez, Vice President and General Manager of Veeco Optical Industrial Metrology. "Veeco was the first to introduce white light profiling capable of measuring the large feature sizes and deflections of MEMS devices. The new dynamic measurement package continues that history of innovation, providing MEMS manufacturers with unprecedented insight into their devices and processes.

The DMEMS option includes a custom illumination source, electronics and MEMS-focused analysis software. The system captures a series of 3D measurement data, generating a video of the device as it cycles through its range of motion. Template-driven SureVision(TM) software provides a powerful set of tools for measuring user-defined in-plane and out-of-plane dimensions. SureVision offers the most comprehensive set of analyses available for determining critical device parameters such as resonant frequency, radius of curvature, shape/distortion and deflection.

The Wyko NT1100 employs non-contact, white light interferometry for Angstrom-resolution measurement of features from 0.1 nm to 2 mm in height. A Data Stitching option adds a motorized X/Y stage and software for rapid measurement of large surface areas. Industry-leading Wyko Vision® analysis software, included with the NT1100, provides extensive data analysis, interactive 2D and 3D displays, advanced data filtering and a statistical database for production measurement.

Veeco Instruments Inc. is a worldwide leader in metrology tools and process equipment for the semiconductor, data storage, telecommunications/wireless, and scientific research markets. Veeco's manufacturing and engineering facilities are located in New York, California, Colorado, Arizona and Minnesota. Global sales and service offices are located throughout the United States, Europe, Japan and Asia Pacific. Additional information on Veeco can be found at www.veeco.com

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