New MC5 Multi-Channel Temperature Analyzer Comes with FlexGlo Technology

Press Release Summary:

The Photon Control’s MC5 Multi-Channel Temperature Analyzer is designed to simultaneously accept optical signals from up to five phosphor-based fiber optic temperature probes. The device provides data communication protocols such as RS485 and EtherCAT. The unit’s phosphor-based probes measure temperature inside plasma etch chambers and plasma deposition chambers. It is operated over a temperature range of -95°C to 450°C and delivers accuracy between ±0.25°C and ±1.0°C.

Original Press Release:

Photon Control Announces New Multi-Channel Temperature Analyzer

VANCOUVER, Nov. 29, 2018 /CNW/ - Photon Control Inc. ("Photon Control" or the "Company") (TSX: PHO), a leading developer and supplier of optical measurement technologies to the global semiconductor industry, is pleased to announce the upcoming prototype release of its new multi-channel analyzer, the MC5, which is scheduled for deployment in the first quarter of 2019. 

The MC5 will be the first product to be released from Photon Control's new family of analyzers. The MC5 analyzes the optical signal from up to five phosphor-based fiber optic temperature probes simultaneously, thereby reducing customer costs and its form factor compared to the equivalent number of single channel units. The MC5 Analyzer has been selected for prototype development and is scheduled for deployment with a leading wafer fabrication equipment supplier for process monitoring in their next generation plasma etch tool.

The MC5 Analyzer features Photon Control's proprietary FlexGlo™ technology which delivers high accuracy and long-term stability in harsh environments. The MC5 Analyzer offers the user a variety of options for data communication protocols, including RS485 and EtherCAT. Photon Control's phosphor-based probes measure the temperature inside plasma etch chambers and plasma deposition chambers, where their immunity to interference from strong radio frequency fields is a critical advantage over traditional approaches such as thermocouples. In a production environment, the combination of the MC5 Analyzer and the Company's phosphor-based fiber optic probes covers a temperature range of -95C to 450C, and accuracies between +/-0.25C and +/-1.0C, depending on the probe design and temperature of the environment.

"As devices continue to shrink to the atomic scale, it is becoming increasingly difficult for chip makers to achieve the yields and uptimes required for high volume production," said Scott Edmonds, Chief Executive Officer. "To overcome these challenges, our customers are asking for more sensing points inside the chamber, better measurement accuracy and lower cost. We believe the combination of the MC5 Analyzer and our field-proven fiber optic temperature probes delivers on all three of these requirements. We are proud of this upcoming design win and look forward to demonstrating the capabilities of the MC5 Analyzer in an advanced plasma etch system."

About Photon Control Inc. 
Photon Control Inc. designs, manufactures and distributes a wide range of optical sensors and systems to measure temperature and position. These products are used by the world's largest wafer fabrication equipment manufacturers and end users in the semiconductor and solid-state industries. Photon Control Inc.'s high quality products provide industry leading accuracy, speed and quality in the most extreme conditions and are backed by a team of experts providing a variety of on-site and remote services including custom design, installation, training and support. Headquartered in an ISO 9001:2015 manufacturing facility in Vancouver, BC, Photon Control Inc. is listed on TSX, trading under the symbol ''PHO." Additional information about the company can be found at

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