Micro-Machining System provides high-volume production.
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Press Release Summary:
Suited for micro-machining, drilling, and laser processing, IX-3000 Class 1 UV Excimer-based laser step and scan ablation system is surrounded by cleanroom enclosure with roof-mounted HEPA filtration. Mask imaging system operates at 248 or 193 nm UV wavelengths and offers 0.2-0.3 micron optical resolution, repeatability, and structural accuracies. Stages feature air-bearing design, and granite base provides vibration and thermal dampening.
Original Press Release:
JPSA Introduces IX-3000 High-Volume Excimer Laser Micro-machining System
Hollis, New Hampshire, USA - J P Sercel Associates (JPSA) announces its new high-throughput IX-3000 system, a Class 1 UV Excimer-based laser step and scan ablation system for micro-machining, drilling, and laser processing of a wide range of materials. The first machine shipped in February 2005 to a customer in the Asian market.
Flexible, powerful, industrial-grade and designed for high-volume throughput, the IX-3000 is a high-accuracy mask imaging system for large field of view (FOV) processing applications. The IX-3000 is also surrounded by a cleanroom enclosure with HEPA filtration. The cleanroom enclosure's HEPA filtration units are mounted on the enclosure's roof.
JPSA's IX-3000 is available operating at 248nm or 193nm UV wavelengths primarily; however, the customer may choose from a variety of different types of lasers depending upon the application. These may include large-area patterning, microvia drilling, microelectronics micro-machining; general drilling; manufacture of inkjet nozzle arrays; flat panel displays, wafer-scale processing; sensors; microfluidics; and many other applications, all with resolution down to 1 micron.
Optical resolution, repeatability, and structural accuracies are sub-micron with 0.2 to 0.3 micron repeatability. The IX-3000 is granite-based, vibration and thermal dampened for optimum stability. The entire system is optimized for high-speed operation.
In making the announcement, Jeffrey P. Sercel, President, said, "The IX-3000 is the most advanced and sophisticated industrial excimer micro-machining system of its kind available in the world today. It's a new generation of UV laser workstation designed for high-speed manufacturing, offering a lower cost of ownership and operation than competitive systems, in part due to its use of highly efficient lasers and optical beam technologies. This results in a higher Beam Utilization Factor, enabling the use of less costly optics and systems components, and an overall lower hourly cost of operation than less efficient laser processing systems."
Each individual system is customized and optimized to meet the needs of each customer's individual application, including mask area, mask dynamics, and step-and-repeat stages. All stages feature a high-accuracy, air-bearing design and offer very fast move-and-settle performance.
For certain applications, the IX-3000 is available with cassette-to-cassette wafer handling, panel-handling, robotics handling, or tape and reel systems as accessories or options. The geometry of the IX-3000 is such that it readily integrates with high-volume part handling systems. Key features include the following:
· Large Field of View with High On-target Fluence - up to 2J/cm2
· Uses less costly small-diameter optics to provide a Large Field of View
· High-precision air bearing mask and part handling stages offer better than 1µm accuracy for highest throughput, quicker payback
· Class 1 Industrial COMO (Coordinated Opposing Motion) system for highest efficiency and rapid ROI
· Granite structure engineered for thermal and vibrational stability, providing lithographic-grade accuracy and repeatability
JPSA products and services include UV excimer and DPSS laser micro machining systems, UV and VUV laser beam delivery systems, UV laser materials processing development, optical damage testing, and excimer laser refurbishment services. JPSA Laser operates a high-performance UV laser job shop as well as a systems engineering and manufacturing business. For more information, visit www.jpsalaser.com, or contact the company at 17D Clinton Drive, Hollis, NH 03049 USA, Tel. 603.595.7048, fax 603.598.3835. E-mail: info@jpsalaser.com.
