Laser Workstation features micron-scale imaging cameras.

Press Release Summary:

Class 1, industrial-grade, IX-250 universal excimer laser micromachining system offers 12 axes of motion, 250 x 200 mm travel for processing greater than 6 in. wafers, and operates across full range of excimer wavelengths. Workstation has flexible beam delivery system (BDS) mounted to granite base to ensure repeatable processing. BDS includes large-aperture optics that accommodates various beam shaping modules. Machine vision alignment and part handling options are available.

Original Press Release:

JPSA Introduces 'Swiss Army Knife' of Excimer Laser Workstations, IX-250

Hollis, New Hampshire, USA - It's the "Swiss Army Knife" of excimer laser workstations, the new IX-250 from J P Sercel Associates (JPSA). Compact, highly accurate, and extremely flexible with up to 12 axis of motion, the IX-250 is a universal excimer laser micromachining system with performance and capacity. It offers 250mm x 200mm travel (for processing > 6" wafers) and operates across the full range of excimer wavelengths, including vacuum UV (VUV) wavelengths of 157nm and 193nm, short-wavelength UV currently used in many emerging technology applications such as
processing sensitive polymers, very high resolution and sub-micron processing, and more.

The IX-250 is a Class 1, industrial-grade workstation that can accommodate virtually any excimer laser, from full size, high power excimers coupled externally (as shown in photo) to mini-excimer lasers that are mounted in the system's lower cabinet. Its extreme flexibility allows the widest range of excimer processing including massively parallel hole drilling, medical device manufacturing, microvias and sensors. Its precise yet flexible beam delivery system (BDS) is mounted to a stable granite base to ensure repeatable processing. The BDS features large-aperture optics for utilization of large excimer beams and can accommodate beam shaping modules such as beam profilometers, dosage control, mirror mounts, homogenizers, mask imaging systems, and more. These, in combination with 12 axis motion capability from its server stepper motor control system and high-quality, high precision cameras capable of micron-scale imaging, make the IX-250 an extremely, accurate, reliable, and versatile system.

The IX-250 is designed to meet CE requirements. The beam delivery system can be
configured differently to suit individual excimer materials processing application
requirements. Options include machine vision alignment and part handling.

JPSA products and services include UV excimer and DPSS laser micromachining
systems, UV and VUV laser beam delivery systems, UV laser materials processing
development, optical damage testing, and excimer laser refurbishment services. JPSA
operates a high-performance UV laser job shop as well as a systems engineering and
manufacturing business. For more information, visit, or contact the
company at 17D Clinton Drive, Hollis, NH 03049 USA, Tel. 603.595.7048, fax

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