Interferometer has 100 µm to 12 mm measuring range.
Press Release Summary:
White Light Interferometer uses non-contact process that enables measurement of surface topography without target damage. It measures surface profile, roughness, step height, microstructure, and other surface parameters. Using reference point mirror or object driven by motorized or piezo drive, optical system has measurement area from 100 µm x 100 µm to 1.0 mm. Depending on camera, number of pixels can be up to 1,500 x 1,500.Original Press Release:
White Light Interferometer from Metrology Resource Introduced with Large Measurement Range but Small Measurement Area
ORTONVILLE, Michigan --- Metrology Resource Company introduces a new optical measurement system based on white light interferometry, a non-contact process that allows users to measure surface topography without target damage.
Ideal for small area measurement applications in various industries, the high speed, highly accurate White Light Interferometer (WLI) doesn't damage or destroy targets and requires less calibration than traditional tactile measuring equipment. The WLI measures surface profile, roughness, step height, microstructure and other surface parameters. A reference point mirror or object driven by a motorized or piezo drive allows measurement within extremely tight tolerances such as grooves for optimum quality control and precision.
"The sensitive non-contact capabilities and fast calibration of the WLI make it ideal for a wide array of applications," noted David Allen, Vice President of Sales and Marketing for Metrology Resource Co. "Common applications include semiconductor components, polished materials, optics, ceramics and metals."
Whitelight-Interferometry Principle
The system quickly calibrates the measurement using the short coherence feature of white light. The episcopic microscope is used to project the target area of the sample onto a CCD camera.
An interferogram is produced by the sample and reference image using Mirau objectives. The height differences of sample and reference generate interference fringes which are evaluated.
Technical Specifications
The WLI has a measuring range of approximately 100 um using the piezo actuator and up to 12 mm (0.48 in.) using the integral motor and features a measurement area of 100 um by 100 um up to 1.0 mm (0.04 in.). Depending on the camera, the number of pixels can be up to 1500 x 1500. Stand off distance also depends on the objective used. Different objectives are mounted on a turret and can easily be turned into the optical path.
Lateral resolution depends on the objective used and the vertical resolution is in the order of the roughness of the object surface. X/Y displacement is 50 to 200 mm, depending on the stage. A unique high brightness LED is used as the light source that enables measurement on badly reflecting surfaces. Halogen lamps used in competitive instruments, the company said, often prevents reasonable data acquisition. Measurement accuracy and working distance are not affected by variations in color and are independent of aperture.
The WLI system consists of a compact microscope-type head, a stable stand with XY stages and related software. An extended microscope mode lets the user obtain 3D images with added features such as zoom, stitching, marking of invalid values and a selection of various measurement areas through use of a revolving objective charger. An OEM version is available for in-line measurement.
Standard XP software of the WLI is easy to use, allows automatic data acquisition and evaluation and features all evaluation procedures. Procedures profiles. For example, from the surface image, the user can extract and process line profiles.
Optional software modules are also available for flatness, roughness and radius measurements Customized software is optional for standard and scientific applications.
The measurement head also comes as a single head for production-type applications in such industries as automotive, electronic or engineering.
About Metrology Resource Co.
Metrology Resource Co. distributes the White Light Interferometer in the North America for Breitmeier Messtechnik of Germany. Other products Metrology Resource distributes range from surface scanners for the visual check of object surfaces for scratches, pores, pits, voids and other such variables to single point measuring sensors like Autofocusing, Confocal and triangulation to measurement stations using LVDT pick ups for various applications.
For more information on the MSC White Light Interferometer, contact Metrology Resource Co., P. O. Box 396, Ortonville, MI 48462 or Telephone 1-800-660-2680 or (248) 628-8671, FAX 905-727-3806 or e-mail david@metrologyresource.com. Metrology Resource can also be found on the web at www.metrologyresource.com.
