Gas Monitor suits semiconductor industrial applications.
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Press Release Summary:
Chemgard(TM) Infrared Gas Monitor detects select gases within the following ranges: 0-10 ppm, 0-100 ppm, 0-1000 ppm, 0-1% volume, 0-10% volume, 0-100% volume, and 0-100% LEL. It incorporates LEL monitoring, NEMA 4 enclosure, and photoacoustic infrared sensing technology to provide accurate, low-level leak detection and process monitoring. It can monitor from 1 to 8 sample point locations and provides 3 levels of alarm control.Original Press Release:
MSA Chemgard(TM) Infrared Gas Monitor for the Semiconductor Industry
The Chemgard(TM) Infrared Gas Monitor from MSA Instrument Division is a complete, flexible platform ideally suited for gas monitoring in the semiconductor industry. The Chemgard Monitor can detect semiconductor cleaning solvents such as sulfur hexafluoride, nitrogen trifluoride, octofluorocyclobutane, octafluorocyclopentene, hexafluoro 1,3 butadiene and various alcohols.
With monitoring ranges from as low as 0-10 ppm to as much as 100% by volume for select gases, including LEL monitoring, a durable NEMA 4 enclosure, and advanced photoacoustic infrared sensing technology, the Chemgard Monitor provides accurate, reliable low-level leak detection and process monitoring.
The Chemgard Monitor's photoacoustic infrared sensing, a high-performance, low-cost gas detection method, is the technology of choice for low parts-per-million (ppm) or parts-per-billion (ppb) monitoring. It is extremely stable, with virtually no zero drift, and greatly reduces interference effects from background gases and humidity.
Featuring an electrochemical or catalytic bead auxiliary sensor option, the Chemgard Monitor can simultaneously detect either oxygen, carbon monoxide or combustible gas, along with one of over 100 infrared-active compounds. The auxiliary sensor gas concentration can be monitored through the unit display or a 4-20 mA analog output, and the sensor fits conveniently inside the standard Chemgard Monitor enclosure.
The Chemgard Infrared Gas Monitor is available in a NEMA 4 wall mount, a 19" rack-mount, or an explosion-proof enclosure, all with four, front-panel button controls. Each version can monitor from one to eight sample point locations and provides three levels of alarm control.
For more information on the Chemgard Infrared Gas Monitor Data Sheet, request literature #07-2033, by dialing 1-800-MSA-4678, or contact your nearest MSA sales representative. To learn about MSA and our other high quality products, visit our web site at: www.MSAnet.com.
