Press Release Summary:
Suited for back-end metrology and packaging process equipment, Film-Frame Handler(TM) supports 200 and 300 mm wafer film frames and can handle up to 50 film frames in one load. Modular system is based on SmartModules(TM) linear mechanisms and SmartServo(TM) distributed motion control architecture. Designed for SEMI S2/S8, it includes intelligent integrated sensing for cassette presence, size, and height and also incorporates 2 independently interlocked load ports.
Original Press Release:
Adept Technology Announces New Film-Frame Handling Platform for Back-End Metrology And Advanced Packaging Process Equipment
New Adept Film-Frame Handler(TM) Supports 200 mm and 300 mm Wafer Film Frames and Minimizes Film Frame Swap Time Maximizing Utilization of Process Equipment
Livermore, California - June 24, 2003 - Adept Technology, Inc. (OTCBB: ADTK.OB), a leading manufacturer of flexible automation for the semiconductor, electronics, fiber optic, telecommunications, and life sciences industries, today introduced the new Adept Film-Frame Handler(TM) platform for back-end metrology and advanced packaging process equipment. The system is designed to provide high film frame capacity and fast swap times to maximize utilization of any type of film frame process equipment. The system supports both 200mm and 300mm wafer film frames and can handle up to 50 film frames in a single load.
"We are seeing a growing need for fully automated film-frame handling and the Adept Film-Frame Handler, with Adept's proven robot and controls components, modular design, and flexible options provides process equipment manufacturer's with a robust handling platform that can accommodate 200mm and 300mm form factors," said Charlie Duncheon, executive vice president of Adept Technology, Inc. "The Adept Film-Frame Handler adds to Adept's family of semiconductor platforms that offer reliable performance, ease-of-use operation and flexible application software to the semiconductor equipment industry."
The Adept Film-Frame Handler system is based on Adept SmartModules(TM) linear mechanisms and the Adept SmartServo(TM) distributed motion control architecture. It is designed for SEMI S2/S8, and includes intelligent integrated sensing for cassette presence, cassette size and height. It also has two independently interlocked load ports. Available design options include SMEMA compliance, compatibility with overhead transfer (OHT) and personal-guided vehicle (PGV) mechanisms, as well as barcode reader for film frame ID, RF tag reader for cassette ID, film-frame cassette mapping, and film-frame protrusion options.
Adept Technology designs, manufactures and markets factory automation components and systems for the semiconductor, telecommunications, fiber optic, automotive, food and durable goods industries throughout the world. Adept's robots, controllers, and software products are used for small parts assembly, material handling and ultra precision process applications. Our intelligent automation product lines include industrial robots, configurable linear modules, flexible feeders, semiconductor process components, nanopositioners, machine controllers for robot mechanisms and other flexible automation equipment, machine vision, systems and software, application software, and simulation software. Founded in 1983, Adept is America's largest manufacturer of industrial robots. More information is available at www.adept.com.
The Adept logo is a registered trademark of Adept Technology; Inc. Adept, Adept Film-Frame Handler, Adept SmartModules and Adept SmartServo are trademarks of Adept Technology. All other trademarks are owned by their respective companies.