Excimer Lasers offer efficient fluorine gas operation.
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Press Release Summary:
Featuring smooth ceramic preionization, LPXPro(TM) Lasers offer pulse repetition rates up to 200 Hz and pulse energies as high as 1,200 mJ. Resonator design uses fully purgable resonator optics, which are mechanically decoupled from laser tube, providing maximum beam directional stability. Gas fill operation exceeds 40 million pulses for ArF and 100 million pulses for KrF. Expected overall lifetime of fluorine-optimized tube is 1.5 billion laser pulses.
Original Press Release:
Advanced LPX-Pro Excimer Lasers Offer Increased Performance and Reduced Cost of Ownership
The new LPXPro(TM) family of high pulse energy excimer lasers from Lambda Physik deliver significantly improved performance characteristics and lower cost of ownership compared to similar excimer lasers. Specifically, LPXPro offers efficient fluorine gas operation, longer gas and tube lifetimes, simpler optics cleaning and superior beam quality and stability. This enhanced performance is the result of engineering advances pioneered by Lambda Physik to meet the needs of demanding industrial and scientific applications. These new lasers replace the LPX series, which has now been discontinued.
The LPX-Pro series lasers are high-duty-cycle excimer lasers with pulse repetition rates up to 200 Hz and pulse energies as high as 1200 mJ. Featuring patented smooth ceramic preionization the LPXPro combines exceptional spatial and temporal energy stability with the highest pulse energies. A new resonator design uses fully purgable resonator optics, which are mechanically decoupled from the laser tube, providing maximum beam directional stability. An important improvement for fluorine gas operation (ArF, KrF, XeF) is the new tube design utilizing components and construction specifically optimized to deliver long-term stable system operation. This improves tube lifetime, and prevents tube contaminants, thereby extending gas refill and optics cleaning maintenance intervals. Gas lifetime is further extended thanks to an internal gas processor that incorporates a novel, multi-element electrostatic filter. Gas fill operation now exceeds 40 million pulses for ArF and 100 million pulses for KrF. The expected overall lifetime of this fluorine-optimized tube is 1.5 billion laser pulses, which is six times better than competitive products.
LPXPro lasers are ideal for many demanding applications, such as precision micromachining, pulsed laser deposition (PLD), drilling, marking, and optical materials testing. They are also useful for scientific applications in spectroscopy and photochemistry, such as LIDAR and dye laser pumping.
Lambda Physik is a worldwide technology leader for pulsed UV and tunable laser sources for lithography, industrial, scientific and medical applications.
For more information, contact your local Sales Representative at 1-800-EXCIMER or visit our website at www.lambdaphysik.com.
