Electrostatic Chuck Power Supply delivers 6-10 kV.
Press Release Summary:
Suited for large surface handling, Model ESC-HV features short circuit and open circuit proof design, low stored energy, and built-in current limiting to safeguard processes from surges and arcs. Fixed bipolar supply provides output stability of 1% or better of output from 5% to full load. Housed in 3.5 x 9.5 x 12.5 in. chassis, unit can be located anywhere and in any orientation. There are no special requirements needed for cooling and shielding.
Original Press Release:
Expanding Electrostatic Power to Large Surface Handling
Gloucester, Massachusetts, February 16, 2006 - Comdel, Inc., trusted supplier of RF and DC power, announces the ESC-HV electrostatic chuck power supply. Configured to deliver from 6 to 10kV of power, the ESC-HV is the ideal solution for large surface handling.
Building on a reputation for reliability, Comdel's new ESC-HV supply is equipped with low stored energy and built-in current limiting, to safeguard processes from surges and arcs. A short circuit and open circuit proof design further enhance product reliability.
For over a decade Comdel has been supplying the semiconductor industry with a broad range of ESC products for wafer handling. The ESC-HV now expands Comdel's products into large surface processing. Consistent with all ESC products is a fully programmable, user-friendly design allowing parameter adjustments to be made through variable controls to give the user maximum flexibility.
The ESC-HV is a fixed bipolar supply with output stability of 1% or better of output from 5% to full load. Contained in a compact 3.5" x 9.5" x 12.5" chassis, weighing 2.5 lbs, the ESC-HV can be located in any convenient location and in any orientation. There are no special requirements needed for cooling and shielding.
About Comdel, Inc.
Comdel, headquartered in Gloucester, Massachusetts, designs, develops and manufactures innovative, high quality RF and DC power systems for leading companies in semiconductor, metal heat-treating, dielectric heating, medical lasers, and thin film markets. Its RF power systems offer the market's best power and frequency range, and are backed by an industry-leading research and development design department. To provide customers with support when and where they need it, Comdel maintains offices in the US, UK, Korea, Southeast Asia, and Japan. Comdel is ISO 9001:2000 certified.
For further information contact:
Lisa Condon, Marketing Manager
Comdel, Inc., 11 Kondelin Road, Gloucester, MA 01930.
Phone: 978-282-0620 or 800-468-3144; Fax: 978-282-4980
Email: lisa_condon@comdel.com; Web site: www.comdel.com
