Dry Vacuum Pump targets semiconductor load lock applications.

Press Release Summary:

Measuring 450 x 230 x 280 mm and weighing 59 kg, Model iXL120 consumes average energy (power at 700 T exhaust pressure) of only 550 W and offers peak pumping speed of 110 m³/hr. It incorporates oil lubricated precision bearings and timing gears, which reduce vibration during pump operation and when pump is mounted on process tool. Unit includes zero nitrogen purge option for processes without corrosive gases, and nitrogen purge option for areas with risk of corrosive gas carryover.

Original Press Release:

Edwards Expands Vacuum Pump Offering for Semiconductor Processing with New Ixl120

Fastest pump down time and low energy consumption provide industry-leading cost of ownership for semiconductor load lock and other clean applications

CRAWLEY, WEST SUSSEX, U.K. - Edwards, a leading global supplier of vacuum and abatement equipment and services, today introduced the iXL120, expanding its range of dry pumps for use in semiconductor manufacturing processes. Designed for load lock and other clean applications, the new iXL120 provides the fastest pump down in its class and low energy consumption for high throughput and low cost of ownership.

"With the introduction of this innovative new pump, Edwards dry pump suite of products, which also include the iGX and iXH series, provide our semiconductor customers with a complete range of vacuum solutions optimized for their manufacturing process requirements," said Andy Mann, semiconductor dry pump product manager at Edwards. "The iXL120's class-leading pumping speed, combined with its low power consumption, small footprint and minimal maintenance, help reduce its cost of ownership. Our pumps' Green Mode, in which power consumption is reduced by up to 92 percent, helps improve both cost of ownership and environmental impact."

With a peak pumping speed of 110m³/h, the iXL120 is 22 percent faster than any other pump in its class (20 liter chamber). The average energy consumption (power at 700T exhaust pressure) is only 550 W, one of the lowest in its class.

The iXL120 is one of the smallest (450mm L x 230mm W x 280mm H) and lightest (59 kg) pumps available for clean and loadlock applications. It is small and light enough to be mounted on the process tool or within the fab's waffle floor, helping to save valuable fab floor space.

Unlike most competing dry pumps, the iXL120 incorporates oil lubricated precision bearings and timing gears. This reduces vibration during pump operation, which is especially important when the pump is mounted on the process tool. It is also more reliable and eliminates routine maintenance.

The new iXL120 pump includes a zero nitrogen purge option for processes that do not use corrosive gases. The zero purge option eliminates the need to provide nitrogen to the pump, simplifying operation and reducing operating costs. The iXL120N includes a nitrogen purge for use where there is a risk of corrosive gas carryover.

For further information about Edwards products please visit www.edwardsvacuum.com.

About Edwards

Edwards is a leading global technology company supplying vacuum and abatement equipment for the manufacture of semiconductors, flat panel displays, LEDs and solar cells and is also a leader in vacuum technology for industrial, scientific, process and R&D applications. The company employs approximately 3,000 people worldwide and has its headquarters in Crawley, UK. Edwards created the concept of the low-maintenance, cost-effective, commercial oil-free 'dry' vacuum pump and offers a wide range of other pumping technologies, and related products, supported by an international sales and service organisation. For more information, please visit www.edwardsvacuum.com.

More from Fluid & Gas Flow Equipment

All Topics