Automated Load Lock handles batches of small substrates.
Press Release Summary:
Benefitting companies in early stages of process development and characterization, Star SL-450 transfers single substrates or substrate holders up to 450 mm in diameter. System uses intelligent motor to transfer and track position of substrate. With Z-lift option, Star SL-450 can hand-off substrates to any process module, including those without lift pins.
Original Press Release:
Hine Automation Expands its Line of Automated Load Locks with The Star SL-450
Tampa, Florida, - Hine Automation today introduced its newest Star system, the SL-450.
Hine's SL-450 is an automated load lock that transfers single substrates or substrate holders up to 450mm in diameter. As with all the Star systems, the SL-450 uses an intelligent motor to transfer and track the position of the substrate. Thanks to Hine's Z-lift option, the Star SL-450 can hand-off substrates to any process module, including those without lift pins.
"OEMs around the world take advantage of our Star systems as a single substrate transfer system and as a substrate carrier transfer system," explained Jose Salas, Business Manager at Hine Automation. "The SL-450 will serve OEMs targeting the R&D and pilot production in the same way. As a single substrate transfer system, the SL-450 can help reduce the initial investment in the development of process for 450mm wafers. Companies in the early stages of the process development and characterization will benefit the most from our Star SL-450."
"As an automated load lock for substrate carriers, our new Star product offers affordable automation for systems processing batches of small substrates. Customers using the SL-450 for transferring carriers can also take advantage of our Z-lift mechanism and implement automation features to their products without adding lift pins to their process modules," added Salas.
The Star SL-450 maintains Hine's tradition of flexibility and reliability and offers the same optional configurations as the SL-200 and SL-300.
About Hine Automation
Hine Automation, LLC is an emergent designer and manufacturer of automation systems and
robotic components. Serving the Original Equipment Manufacturers (OEMs) in the
semiconductor, solar, flat panel display and related industries around the world, the company's robotic components are based on the quality and reliability of the original Hine robotics. Hine satisfies a wide range of needs from flexible research and development environments to more stringent manufacturing environments.
