AMETEK Rotron Exhibits Semi-Cool Precision Fans and Custom Cooling Systems for the Semiconductor Industry

High-reliability, compact fans designed for military/aerospace missions assure dependability and consistent temperatures for semiconductor applications

AMETEK Rotron (www.rotron.com) exhibits its SemiCool custom cooling subsystems for high-reliability cooling of semiconductor production processes at Semicon Japan. Including the Rotron MAXIAX vaneaxial fans originally designed for critical military and aerospace applications, the SemiCool systems offer precise temperature control in a compact package.

Complete SemiCool systems include high reliability fans, optimized heat exchangers and custom ductwork. Alternatively, customers can integrate the MAXIAX fans into their own cooling subsystems.

Optimized fans with diameters ranging from 152.4mm (6”) to 203.2mm (8”) provide airflows of 425 l/s (900 CFM) at 254mm WG (10 IWG), with efficiencies approaching 60%. This is a significant departure from standard 0.9 m (3’) tall industrial blowers commonly used in semiconductor production facilities. Designed to operate with 400 Hz industrial power converters, the fans feature rapid response, infinite speed control and minimal space requirements – all designed to support consistent system operating temperatures.

Applications:

• Semiconductor fabrication

• Semiconductor production equipment OEMs

• Lamp cooling

• Thermally controlled process air circulation

• Process heat removal

• Control electronics generated heat

• Vapor deposition

• Etching process

• Wafer Fabrication

SemiCool systems can meet the cooling needs of all heat-intensive process steps in semiconductor production. Systems are compliant with semiconductor industry traceability and configuration control requirements. They can be certified to TUV requirements and are produced in a AS9100, ISO9001 manufacturing environment.

AMETEK Rotron is a division of AMETEK, Inc., a leading global manufacturer of electronic instruments and electromechanical devices with annual sales of US$4.0 billion.

A. Compact MAXIAX vaneaxial fans, originally designed for critical military applications, provide high reliability cooling of semiconductor production processes.

Product Sales Contact:

UK

AMETEK Airscrew Ltd.

Steve Galloway

Phone: +44.12.58.45.06.41

Website: http://www.ametekaerodefense.com

Email: steve.galloway@ametek.co.uk

France:

EPCI ENGINEERING

TEL: +33-1-34-48-34-10

FAX: +33-1-34-21-80-40

Jean-Louis Furic,

Managing Director

Email: jl.furic-epci@wanadoo.fr

Germany:

ANDREAS ZOELLNER CONSULTING SERVICES

TEL+49-7624-983-717

FAX: +49-7624-983-718

Andreas Zoellner

Email: a.zoellner@zoelle1.de

Italy

Connex Italiana S.r.l.

Piercarlo Infrano

Phone: +39.02.39.32.11.47

Fax: +39.02.64.64.11.95

Email: piercarlo.infrano@connex-italiana.com

Netherlands

BMF System Parts B.V.

Marcel Visscher

Phone: +31-40-8512-70

Fax: +31-40-8512-71

Email: marcel.visscher@bmf-systemparts.com

China

HongKong Everblooming International Co., Limited

Jie Yang

Phone: +86-10-59432675

Fax: +86-10-81541897

Website: http://www.bjdfht.com

Email: zly@bjdfht.com

India

AMETEK Instruments India Private Limited

Anantha Hanumaiah

Phone: +91 80 6782 3259

Fax: +91 80 6782 3232

Email: ananth.h@ametek.com

Japan

Nippon Aircraft Supply Co., Ltd.

Katsu Minegishi

Phone: +81-3-5368-5200

Fax: +81-3-5368-5201

Email: kminegishi@nasco.co.jp

Taiwan

Avatar Technology Co., Ltd.

David Yang

Phone: +886-2-26498720

Fax: +886-2-26498720

Email: david@avatartec.net

Republic of Korea

Haneun Industry Co. Ltd.

K. H. Choi

Phone: +82-2-558-2616

Fax: +82-2-558-2619

Email: choi@haneun-ind.com

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