All-Stainless Steel Piezo Transducer has 3 setpoint relays.

Press Release Summary:

Mountable in any orientation, 902B Absolute Piezo vacuum transducer suits harsh processes and is resistant to damage from air inrush and vibration. Unit integrates electronics and MEMS-based Piezo sensor with metal-sealed, stainless steel 316 diaphragm and provides seamless, gas-independent vacuum pressure measurement from 0.1–1000 Torr. Along with 3 setpoint relays, features include 100°C bakeout temperature, analog output and digital communication, and multiple analog output emulations.

Original Press Release:

MKS Introduces the 902B Piezo Transducer

Features all-stainless steel construction, three setpoint relays

Andover, MA – MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has introduced the 902B Absolute Piezo vacuum transducer which integrates a MEMS-based Piezo sensor with a metal sealed, stainless steel 316 diaphragm and integrated electronics to provide seamless, gas-independent vacuum pressure measurement between 0.1 and 1000 Torr. The 902B transducer provides an economical solution for cost-sensitive applications requiring absolute pressure measurement in many different vacuum process environments.

The robust design and stainless steel construction make the 902B Piezo transducer a cost-effective, highly accurate alternative to conventional transducers, suitable for harsh processes and resistant to damage from air inrush and vibrations. It features up to three setpoint relays, a high bakeout temperature of 100°C, and a reduced process cycle time due to the sensor’s fast, accurate and repeatable pressure measurements. The 902B provides ease of operation, with both analog output and digital communication; an optional, integrated display; and multiple analog output emulations. Its compact, single unit design is mountable in any orientation for ease of installation. The 902B replaces existing 902 transducers and is backward compatible for all 902 applications.

The 902B sensor is ideal for a wide range of applications, including semiconductor manufacturing, thin film coatings, vacuum furnaces, freeze-drying, analytical instruments, medical devices, automotive and aerospace.

About MKS:

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, and vacuum technology. Our primary served markets are manufacturers of capital equipment for semiconductor devices, and for other thin film applications including flat panel displays, solar cells, light emitting diodes, data storage media, and other advanced coatings. We also leverage our technology in other markets with advanced manufacturing applications including medical equipment, pharmaceutical manufacturing, energy generation, and environmental monitoring.

Corporate contact:

MaryAnn Naddy

Phone: 978-645-5538

Fax: 978-557-5100

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