Alignment Stage features open-frame design.

Press Release Summary:



With table size of 1,500 x 1,500 mm, Type CMX incorporates X-Y module design, where 4 hollow modules are sandwiched between, and at each corner of base plate and top table. Each module contains pre-loaded Cross LM Guide Type CSR for XY table motion, as well as Cross Roller Ring that couples XY motion of each module to top table. Large openings allow access from top and bottom. Stage produces simultaneous X-Y and rotary motion with positioning repeatability of ±1.0 mm.



Original Press Release:


THK Unveils Type CMX Ultra-Low Profile X-Y Open Frame Alignment Stage


Schaumburg, IL - (July 11, 2005) THK introduces another innovation in the world of high accuracy positioning with its low-profile Type CMX Alignment Stage.

The new stage incorporates a patent pending X-Y module design, where four hollow modules are sandwiched between, and at each corner of, a base plate and a top table. Large through openings are included to allow complete access from the top and bottom of the stage. The use of X-Y modules enabled THK to design this 3-axis stage with only the two main plates with large openings. This results in a significant reduction in weight and height, even for the line's largest standard table size of 1500mm x 1500mm.

Each module contains a THK pre-loaded Cross LM Guide Type CSR for the XY table motion, as well as a Cross Roller Ring that couples the XY motion of each module to the top table. This allows relative rotation of the top table without any need for a rotary table.

The Type CMX Alignment Stage produces its simultaneous X-Y and rotary motion with positioning repeatability of ±1.0-m and up to 30-m parallelism when the stage's three servo motors are driven in various combinations. Minimum resolution is 0.12-m and maximum carrying mass exceeds 150 kg. The Type CMX is an ideal choice for automated inspection/production of: large flat panel displays, semiconductors, screen printing, and many other applications where critical alignment motion is required from a low-profile / lightweight X-Y platform.

To learn more, log on to www.thk.com or contact THK America, Inc., 200 E. Commerce Dr., Schaumburg, IL 60173, Phone: (847) 310-1111, Fax: (847) 310-1182, e-mail: chicago@thk.com.

More from Software

All Topics

COVID-19 Response Suppliers COVID-19 Response:
Can Your Company Help Provide Critical Supplies?

We are using the power of our platform to aid in the mass shortage of critical supplies. If your company can help provide supplies, capabilities, or materials for products such as N-95 Masks and Tyvek SuitsPlease let us know.

COVID-19 Response Suppliers