Wafer Transferring Tools

Machinery & Machining Tools, Material Handling & Storage, Mounting & Attaching Products

Picosun Wins Market in IC, MEMS, and LED Manufacturing

May 27, 2015

ESPOO, Finland — Picosun Oy, the leading provider of high quality Atomic Layer Deposition (ALD) technology for global industries, reports winning important production markets in MEMS, LED, and other III-V compound semiconductor device manufacturing. To provide these manufacturers with always the best, most comprehensive ALD solutions, Picosun has extended its range of automatic vacuum batch... Read More

Cleaning Products & Equipment, Materials & Material Processing, Mounting & Attaching Products

ULVAC Receives Order for Resist Strip and Residue Cleaning System from U.S. MEMS Manufacturer

March 24, 2015

Methuen, Massachusetts - ULVAC Technologies, Inc. has sold a high throughput Enviro-Optima™ Resist Strip and Residue Cleaning System to a U.S. MEMS manufacturer. The system, built in Massachusetts, will be installed this spring at the MEMS manufacturer's facility. The customer evaluated the Enviro-Optima™ system at the ULVAC Applications Lab in Methuen, MA and has successfully converted... Read More

Chemical Processing & Waste Management, Material Handling & Storage, Mounting & Attaching Products

Spin Rinse Dryers eliminate spray nozzle replacement.

July 15, 2014

Utilizing Deluge technology to deliver continuous cascade of rinse water, Trident™ SRD Tools provide full PLC control with color touchscreen displays. Systems feature ultra-pure non-contact N2 heaters, full wrap-around bowl heaters, direct-drive brushless motors, negative-pressure motor seals, and FM4910 compliance. Offered in bench-top, roll-around, single-stack, and double-stack models, tools can process batches of up to 50 substrates, in sizes from 75–300 mm. Read More

Laboratory and Research Supplies & Equipment, Mounting & Attaching Products

MicroSense Ships Novel LED Sapphire Wafer Measurement Tools for Process Control

June 18, 2014

LOWELL, Mass. — MicroSense, LLC, a leader in non-contact wafer metrology systems, today announced multiple shipments of its new, next-generation automated sapphire wafer metrology tool, the MicroSense UltraMap C200.  Designed specifically for high throughput dimensional measurement of sapphire wafers for LED manufacturing, the UltraMap C200 provides throughput of ninety 6" diameter sapphire... Read More

Chemical Processing & Waste Management, Fluid & Gas Flow Equipment, Material Handling & Storage, Mounting & Attaching Products

Virtual Industries to Debut Its New Line of Teflon Vacuum Cups for Handling Contamination Sensitive Materials during Productronica 2013

November 1, 2013

COLORADO SPRINGS, CO -- Virtual Industries Inc., a leading supplier of manual vacuum handling solutions, announces that it will display three new and advanced systems for part handling in Stand #B2.259 at the 20th international Productronica International Trade Fair, scheduled to take place November 12 - 15, 2013 at the New Munich Trade Fair Centre in Munich, Germany. The Small Part Handling... Read More

Machinery & Machining Tools, Material Handling & Storage, Mounting & Attaching Products, Green & Clean

EV Group Showcases Latest Photovoltaic Manufacturing Advances at Intersolar North America 2013

July 16, 2013

SAN FRANCISCO – INTERSOLAR NORTH AMERICA - EV Group (EVG), a leading equipment supplier for photovoltaic (PV) cell and module manufacturing, including anti-reflective and anti-soiling coating, nanoimprint lithography, thin-wafer processing, wafer bonding and photolithography equipment, today announced it is showcasing its latest innovations for improving performance and reducing costs of... Read More

Chemical Processing & Waste Management, Mounting & Attaching Products

Wafer Vacuum System employs long-life diaphragm pump.

April 24, 2013

Able to handle range of wafers, solar cells, and other substrates, WAFER-VAC system with 8 in. molded wafer tip (WV-9000-MW8) is Class 100 Cleanroom safe and plugs directly into 110 V, 50/60 Hz. Wafer vacuum handling tool employs long-life diaphragm vacuum pump that generates up to 10 in. of mercury with open air flow of 2.3 Lpm. Provided with push-button wafer tip pen and 6 ft of clear coiled vacuum hose, 7 ¼ x 3 x 2 ½ in. unit connects to ground automatically with 3-wire power cord. Read More

Machinery & Machining Tools, Material Handling & Storage, Mounting & Attaching Products, Robotics

Stäubli Six-Axis TX60L cr Handles Wafers with Care

March 22, 2013

Clean room robot with precious cargo Robots moving parts from A to B may sound like a routine procedure. It is a very different matter, however, when they are handling wafers in the back-end area, since at this stage, a single wafer can be worth as much as 10,000 euros. SÜSS MicroTec relies on the high-precision Stäubli TX60L cr robot to ensure ultra-safe handling of these precious cargos. ... Read More

Laboratory and Research Supplies & Equipment, Material Handling & Storage, Mounting & Attaching Products

Wafer Vacuum Handling System accommodates variety of parts.

June 13, 2012

Used for handling wafers and solar cells, WV-9000 WAFER-VAC System does not require any in-house air plumbing and plugs directly into 110 V, 50/60 Hz supply. General-purpose tool has diaphragm vacuum pump that generates up to 10 in. Hg with open air flow of 2.3 lpm. ESD-safe unit is also Class 100 Clean room safe and connects to ground automatically with 3-wire power cord. Illuminated on/off switch, pushbutton wafer tip pen, and 6 ft clear coiled vacuum hose come standard. Read More

Material Handling & Storage, Mounting & Attaching Products

Brewer Science Introduces Thin Wafer Handling Systems for Compound Semiconductor Device Processing

May 1, 2012

Brewer Science, Inc., introduces new wafer processing equipment designed for thin wafer separation and post-debonding cleaning, steps that are critical for ultrasensitive compound semiconductor (CS) device processing. These latest equipment designs enable thin wafer handling technologies that can broaden your process window and lower your total cost of ownership by reducing yield loss and... Read More

Material Handling & Storage, Mounting & Attaching Products

Brewer Science and SUSS MicroTec Jointly Commercialize ZoneBOND(TM) Technology for Thin Wafer Handling

December 13, 2011

Garching/Munich, GERMANY / ROLLA, MO, USA - Brewer Science, Inc., the inventor of ZoneBOND(TM) technology and world leading expert in materials and processes for thin wafer handling, and SUSS MicroTec, a leading supplier of equipment, are joining forces in commercializing ZoneBOND(TM) technology for thin wafer handling.<4444>SUSS MicroTec, market leader in room temperature debonding process... Read More

Machinery & Machining Tools, Material Handling & Storage, Mounting & Attaching Products

Wafer Handling System boosts high-volume manufacturing performance.

December 8, 2011

Addressing high-volume manufacturing (HVM) requirements, XT Frame accommodates up to 9 process modules and delivers flexibility by accommodating various combinations on single tool platform. Features include equipment front-end module with speed-optimized handling system, enough module spaces for parallel processing of several wafers, as well as up to 4 FOUP (front opening unified pod) load ports. Additionally, local FOUP storage system allows efficient, continuous mode operation. Read More

Electrical Equipment & Systems, Mounting & Attaching Products, Optics & Photonics

Despatch Industries Releases Results of Study Verifying Effectiveness of IL-RTS Bow Removal Tool

October 14, 2010

Minneapolis, Minn., U.S.A. - Despatch Industries, a leading technology and equipment provider for the solar industry, is releasing the results of a study the company conducted on enabling thin wafers to become high efficiency silicon solar cells. The results were presented in a technical paper at the EU Photovoltaic Solar Energy Conference in Hamburg, Germany. <4444>The preface of Despatch's... Read More

Mounting & Attaching Products, Test & Measuring Instruments

Wafer Handler improves microelectronics industry yield.

August 17, 2010

In addition to offering 360° rotation for full macro examination of wafer's back surface and edges, AL120(TM) can transfer 100-200 mm dia wafers with thicknesses down to 90 µm to meet demands of thin-wafer manufacturing. Recipe-driven tool can be programmed for different configurations, while pushbutton recipe selection allows operator to load different products instantly. System can also be adapted for smaller-diameter wafers and used with non-Olympus microscope models on custom basis. Read More

Mounting & Attaching Products, Robotics

Non-Contact Solar Wafer End Effector handles thin solar cells.

July 28, 2010

Utilizing Non-Contact Transfer units (NCT), End Effector creates dynamic lifting force using positive airflow to handle solar PV wafers without physical contact with their surface. Edge guides align and constrain wafer during transport, while presence sensor enables constant detection and feedback for integration with SCARA, 6-axis, or Cartesian robots. Unit is available for 156 mm polycrystalline and multi-crystalline solar cells, and handles and transports wafers from 50-300 µm thick. Read More

Material Handling & Storage, Mounting & Attaching Products

Load Port meets wafer isolation and fab requirements.

October 12, 2009

Automatic Door Opener(TM) delivers operational speed, cleanliness, reliability, and integration flexibility for loading/unloading SEMI standard 300 mm FOUPs. With MCBF over 650,000 cycles and calculated MTBF over 20,000 hr, system delivers better than Class 1 particle performance when integrated in Class 100 or better environment. It requires no periodic lubrication or re-alignment and utilizes DSP controlled electro-mechanical/pneumatic closed-loop servos for repeatable motion. Read More

Material Handling & Storage, Mounting & Attaching Products

DEK and CHAD to Demonstrate Enhanced Thin Wafer Capabilities at Semicon West

June 30, 2009

Debuting its most recent technology advance, mass imaging leader DEK will showcase the company's new thin wafer processing expertise from booth #811 at the upcoming Semicon West event in San Francisco, California. A full line solution that incorporates a Galaxy Thin Wafer System and a next-generation CHAD WaferMate(TM) wafer handler, this latest development resolves traditional challenges... Read More

Material Handling & Storage, Mounting & Attaching Products

Automation Components optimize vacuum wafer transport.

January 28, 2009

Enabling throughput rates to 250 wafers/hr, ExpressConnect(TM) components are offered as system of 5 modular building blocks that are combined to generate unlimited configurations for wafer automation. Products include Shuttle-Lock(TM), used to perform all wafer transfer functions; SEC-1000 Equipment Controller; Trans-Center(TM) 6-9 wafer load-lock module; Multi-Wafer Buffer, 4-wafer transfer module; and Dual Wafer Load-Lock entrance/exit point. Read More

Mounting & Attaching Products, Test & Measuring Instruments

Wafer Loader can handle wafers as thin as 100 µm.

July 31, 2008

Using chuck system to transfer wafers and featuring optimized arrangement of sensor beams, NWL200 Series Wafer Loader achieves reliable loading for inspection of semiconductors. Wafer-slot buttons on front panel enable users to select specific wafer in any slot with touch of a button, while large LCD screen allows operators to set conditions and check operating status. Users can also program recipes and backup data from any PC when loader is connected to LAN. Read More

Machinery & Machining Tools, Material Handling & Storage, Mounting & Attaching Products

Automation Platform aids semiconductor metrology OEMs.

November 29, 2007

Designed to meet Semi S2 and S8 requirements, Atlas platform uses industry-standard 300 mm/200 mm capable EFEM to align and transfer wafers from loadports to inspection station at rates to 180 wph. Solution is designed to allow for wafer level thermal and vibration isolation, providing controlled environment for tool-to-tool matching. Connectivity software as well as integrated power distribution and control system with GUI are included. Customization options are available. Read More