Vibration Isolator is designed for semiconductor tools.
July 30, 2007 -
Available in 3 DOF or 6 DOF, Electro-Damp® PZT provides semiconductor manufacturers with active inertial vibration cancellation system. Frame-mountable, stiff unit features extended stroke piezoelectric actuators, settling time optimized to respond to stage motion, and no soft air suspension. Also suited for use in microlithography, inspection, and metrology tools, product design facilitates installation with no feedforward required.
(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)
Original Press release
Technical Manufacturing Corp.
15 Centennial Dr.
Peabody, MA, 01960
USA
TMC Introduces Electro-Damp® PZT at Semicon West - A Breakthrough in Vibration Isolation for Semiconductor Tools
PEABODY, Massachusetts, July 17, 2007 - Technical Manufacturing Corporation (TMC) introduced the Electro-Damp® PZT active inertial vibration cancellation system today at Semicon West in San Francisco.
Electro-Damp PZT combines the best features of TMC's STACIS® active hard-mount and its Electro-Damp® active air mount systems. Stacis achieves extremely efficient vibration isolation using piezoelectric actuators and a stiff suspension. Electro-Damp is an active, inertially damped, pneumatic vibration isolator. The new Electro-Damp PZT incorporates the best of both patented technologies to provide a cost-effective, frame-mountable, stiff, yet extremely efficient, vibration isolation system for use in microlithography, inspection, and metrology tools.
"TMC continues to employ advancing technology to develop new products that solve the conflicting demands semiconductor tools place on their vibration isolation systems," said Steve Ryan, TMC vice president, marketing. "The new Electro-Damp PZT is a simple, robust, cost-effective product with vibration isolation comparable to our Stacis active piezoelectric vibration cancellation system."
Electro-Damp PZT features extended stroke piezoelectric actuators, fast settling time in response to stage motion, and has no soft air suspension. Available in either 3 DOF or 6 DOF, the compact Electro-Damp PZT installs easily with no feedforward required.
TMC designs and manufactures precision vibration isolation systems for sensitive research and manufacturing processes worldwide. The ISO 9001-certified company's products are industry standards in semiconductor manufacturing, life sciences and photonics and also used in academic, industrial and military research.
STACIS and Electro-Damp are registered trademarks of Technical Manufacturing Corporation.
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