Vacuum Inlet Trap protects pumps in deposition processes.
March 4, 2008 -
Constructed from 304 stainless steel and available with ISO-160 flanges, MV Multi-Trap® 16 in. Vacuum Inlet Trap features knock-down stage, 2 stages of user-selectable filter elements, and cooling coils for removing condensable byproducts and corrosives from deposition process forelines. It is capable of up to 2,500 cu in. of solids accumulation and can be customized with various filter options to remove residual solvent vapor acids and particulates.
(Archive News Story - Products mentioned in this Archive News Story may or may not be available from the manufacturer.)
Original Press release
Mass-Vac, Inc.
247 Rangeway Rd., P.O. Box 359
North Billerica, MA, 01862 0359
USA
Vacuum Pump Inlet Trap Protects Pumps Used In Deposition Processes
A high capacity vacuum inlet trap for protecting vacuum pumps used in highly corrosive deposition processes which generate large amounts of condensable byproducts is available from MV Products of No. Billerica, Massachusetts.
The MV Multi-Trap® 16" Vacuum Inlet Trap features a knock-down stage, two stages of user-selectable filter elements, and cooling coils for removing condensable byproducts and corrosives from deposition process forelines. Designed to protect vacuum pumps used in ALD, HCD, Nitride, TEOS, TiN, and other demanding processes, this trap is constructed from 304 stainless steel and is available with ISO-160 flanges.
Capable of up to 2,500 in3 of solids accumulation, depending upon material, the MV Multi-Trap® 16" Vacuum Inlet Trap can be customized with the following filter options: stainless steel gauze, micro-rated polypropylene, activated alumina or charcoal, Sodasorb® and other types to remove residual solvent vapor acids and particulates. Filters offered are 4.5" and 9" tall.
The MV Multi-Trap® 16" Vacuum Inlet Trap is priced from $ 4,800.00 (list) depending upon configuration. Quotations are available upon request.
For more information contact:
MV Products, Division of Mass-Vac, Inc.
Herbert R. Gatti, Marketing
247 Rangeway Rd. / P.O. Box 359
No. Billerica, MA 01862-0359
(978) 667-2393 FAX (978) 671-0014
e-mail: drolph@massvac.com (tech contact)
www.massvac.com
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