UV Laser supports microelectronics manufacturing.
April 10, 2013 -
Offering 33 W of output at 355 nm, AVIA™ 355-33 Micromachining Laser includes ThermEQ™, PulseEQ™, and PulseTrack™, which enable precise control of delivered pulse energy, allowing OEM to define and optimize laser process. Laser also has automated harmonic crystal shifter to maintain constant output power for more than 20,000 hours. With Posilock™ beam position sensor and feedback loop, AVIA 355-33 provides optimal beam position stability over lifetime.
Coherent Launches Highest Power UV Laser for Microelectronics Manufacturing
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Coherent Inc., Laser Group
5100 Patrick Henry Dr.
Santa Clara, CA, 95054-1112
Press release date: April 1, 2013
Santa Clara, Calif., –The newest AVIA™ micromachining laser from Coherent, Inc. (Santa Clara, CA) (Nasdaq: COHR) delivers the highest power commercially available at its wavelength and repetition rate. Specifically, the AVIA 355-33 offers 33 Watts of output at 355 nm (at 110 kHz). This high power translates directly into increased production efficiency, thus lowering cost per part.
The AVIA family of lasers has the longest track record of highly reliable, 24/7 operation in microelectronics manufacturing, and offers several features specifically designed to enhance its processing capabilities and minimize long term cost of ownership. These include ThermEQ™, PulseEQ™, and PulseTrack™ which enable precise control of the delivered pulse energy, allowing the OEM to define and optimize their laser process. The laser also has an automated harmonic crystal shifter to maintain constant output power for >20,000 hours and to maximize lifetime. In addition, the laser’s unique Posilock™ beam position sensor and feedback loop results in very high beam position stability over the life of the laser, thereby ensuring process consistency.
The AVIA 355-33 is targeted at a wide range of demanding, high-throughput microelectronics fabrication applications. Typical examples include via-hole drilling in printed circuit boards and flip chips and dicing and scribing of silicon wafers containing low-k dielectric materials.
Founded in 1966, Coherent, Inc. is a world leader in providing photonics based solutions to the commercial and scientific research markets, and is part of the Standard & Poor’s SmallCap 600 Index and the Russell 2000. Please direct any questions regarding this press release to Victor David, product line manager, at (408) 764-4088. For more information about Coherent, including product and financial updates, visit our website at http://www.Coherent.com.