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Swagelok® CR-288® Concentration Monitor Recieves Best Product Award

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Swagelok Company

31400 Aurora Road, Solon, OH, 44139-3492, USA

Original Press Release

Swagelok® CR-288® Concentration Monitor Recieves Best Product Award

Press release date: July 15, 2008

SOLON, Ohio (July 15, 2008) - Representing the level of excellence required in semiconductor manufacturing, the Swagelok® CR-288® concentration monitor has been named by Semiconductor International as a top product for 2008. The CR-288 concentration monitor is one of 20 products honored in the publication's 19th annual Editors' Choice Best Product Awards, which recognizes outstanding products used in semiconductor manufacturing and related industries. Winners are selected by a panel of Semiconductor International editors.

"Our Best Products program is different from others in that we are recognizing proven products and materials that have been acknowledged by their users as providing superior performance and/or capabilities that were not possible with competing tools or materials," said Laura Peters, Editor-in-Chief of Semiconductor International. "We are pleased to honor the many people and companies that have worked so hard to bring these innovations to the market."

The CR-288 concentration monitor addresses a critical requirement in the semiconductor industry for improved monitoring and control of liquid chemicals employed in device manufacturing. Installed in the process stream or at point of use where chemicals are delivered or blended, the technology delivers real-time, highly accurate measurements of the concentration and temperature of process fluids.

Proprietary software enables the technician to calibrate the unit for chemical mixtures used in semiconductor laboratory or manufacturing processes, including etching, wafer cleaning, photoresist deposition or removal, and chemical mechanical planarization (CMP). Able to monitor up to four separate fluid streams with one digital display unit, the device can help the industry reduce chemical consumption, improve process control and visibility, detect process problems, reduce wafer scrap, and improve productivity.

The CR-288 monitor employs an LED light source, a mirror, a sapphire, and a photodiode-array detector to measure refraction. Light is beamed at a sapphire window that is in contact with the process liquid. A reading is taken as the light bounces back, enabling computer software to determine the index of refraction for the liquid in question. That index of refraction may then be compared to the index of refraction for the desired blend or concentration of chemicals.

The only components that come into contact with the liquid are the sapphire window and the body of the sensor, which is made of ultrahigh purity modified PTFE. A thermocouple inside the optical fluidic cell takes a temperature reading. A liquid's index of refraction is a function of concentration and temperature.

Headquartered in Solon, Ohio, U.S.A., Swagelok Company is a major developer and provider of fluid system solutions, including products, assemblies, and services for the semiconductor, research, instrumentation, pharmaceutical, oil and gas, power, petrochemical, and alternative fuels industries. Its manufacturing, research, technical support, and distribution facilities support a global network of more than 200 authorized sales and service centers in 57 countries. For more information about Swagelok, visit the company's Web site at www.swagelok.com.

Company Name: Swagelok Company Address 1: 31400 Aurora Rd. City: Solon State: OH Zip: 44139 Country: USA Phone: 440.349.5934 URL: www.swagelok.com

Contact Name: Theresa Polachek E-mail: theresa.polachek@swagelok.com

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