Bede X-ray Metrology Wins BedeMetrix(TM)-L Order from Tokyo Electron America, Inc |
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Bede
Belmont Business Park
Durham, DH1 1TW
United Kingdom
Press release date: June 28, 2006
DURHAM, UK - Bede X-ray Metrology, a leading global provider of X-ray metrology systems to the semiconductor industry, is pleased to announce that it has won an order for a BedeMetrix(TM)-L system from Tokyo Electron America, Inc, Austin, TX, USA. The BedeMetrix(TM)-L process control system for semiconductor research and development will be used to investigate leading-edge front end materials including SiC and SiGe.
Mr Anthony Dip, Process Manager, Tokyo Electron America, Inc said, "X-ray metrology is more important than ever in helping semiconductor manufacturers to fully understand their materials and processes. For Tokyo Electron as a thin film equipment provider, the BedeMetrix(TM)-L system is the best solution to enable us to analyse important advanced materials, using parameters that are essential for device functionality at our customers' new technology nodes."
Jim Polasik, Chief Operating Officer, said, "I am delighted that Tokyo Electron is purchasing a BedeMetrix(TM)-L for their advanced metrology needs. The BedeMetrix(TM)-L is a versatile X-ray metrology system for 300mm process development on both front and back end materials.
Bede systems are at the forefront of enabling technology for semiconductor manufacturing at 90nm technology nodes and below. Due to its short wavelength, X-ray metrology offers increased analysis of material properties and parameters including thickness, at atomic levels. However, unlike optical and opto-acoustic metrology, the system also measures strain, relaxation, strain, phase, composition and density. This information is critical for the full characterization of materials which are being used today.
I am pleased to be working with another of the world's leading semiconductor companies as they introduce the latest generation of advanced semiconductor manufacturing technology."
Belmont Business Park, Belmont, Durham, DH1 1TW, UK
T: ++ 44 (0)191 332 4700 F: ++ 44 (0)191 332 4800 E: info@bede.co.uk www.bede.com
For more information, contact: Frank Hochstenbach, Global Sales & Marketing Director Bede X-ray Metrology Belmont Business Park, Durham, DH1 1TW, UK TEL: +44 (0)191 332 4700; FAX: +44 (0)191 332 4800 E-MAIL: frank.hochstenbach@bede.co.uk
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