Steppers

Stepper suits advanced-packaging applications.

Saturn Spectrum 300e(2) stepper, offers dual-lamp illumination option, which provides wafer-plane irradiance (>3400 mW/cmÂ-²) and throughput while exposing thick resists. Its edge processing capabilities provide edge-exposure and exclusion capability to deliver yield, imaging, and throughput performance required for flip-chip and wafer-level packaging (WLP) applications. Stepper also uses...

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Stepper Family suits nanotechnology applications.

NanoTech(TM) 100 offers 1.0 or 0.8 micron lens options, Machine Vision System (MVS), and PC controller. NanoTech 160 is available with 2.0, 1.0, or 0.8 micron lens. NanoTech 190 offers 2.0 or 1.0 micron lens and application-specific, air-bearing rowbar patterning system. Designed for processing thick and thin films, NanoTech 200 features 1.4 or 1.0 micron lens options. With production resolution...

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