Multi Axis Positioning Stages / Tables

Precision Stages are made for high-vacuum environments.
Multi Axis Positioning Stages / Tables

Precision Stages are made for high-vacuum environments.

Built with components and hardware selected for ultra high vacuum use (10E-10 torr), model MT105-LM-HV 2-axis (XZ) stage is available with 30 or 50 mm travel. Positioning accuracy is 3 microns, with repeatability of ±0.2 micron. Product can also be provided as classic XY stage without adapter plate or configured as XYZ system. Driven by piezo motor, each stage includes stainless steel...

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XY Positioning System supports 100-1,000 mm travel ranges.
Multi Axis Positioning Stages / Tables

XY Positioning System supports 100-1,000 mm travel ranges.

Wide base version of Airglide LED Wafer System is designed for max straightness (±0.5 Â-µm), accuracy (less than 1 µm), and velocity stability while scanning. Positioner, intended for stepping or scanning applications, is suited for laser processing of LED or semiconductor wafers as well as metrology or precision imaging systems. It can be setup as individual precision axis or...

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XY Positioning Stages come in aluminum-based versions.
Multi Axis Positioning Stages / Tables

XY Positioning Stages come in aluminum-based versions.

Combining direct drive linear motor with 81 x 93 mm footprint, MMG Mini-Mag Stages offer 25, 50, 100, or 150 mm travel with uncompensated accuracy from 2-8 Â-µm and resolution options from 1.0 µm down to 5 nm. Units feature 8 kg load capacity, integral anti-creep linear guideway, and adjustable limits. For XY sample positioning, sustained throughput up to 2,000 moves/min is possible....

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Parallel Positioner comes in standard and vacuum versions.
Multi Axis Positioning Stages / Tables

Parallel Positioner comes in standard and vacuum versions.

Measuring 130 mm dia x 115 mm high, M-811 Miniature Hexapod can handle loads to 11 lb and position them in all 6° of freedom with 0.04 Â-µm actuator resolution and ±0.5 µm repeatability. Unit features XYZ travels of 35/35/13 mm and velocities to 10 mm/sec. Positioner comes bundled with software and digital controller with high-speed Ethernet connectivity. Unlike rotation...

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X-Y Positioning Stage suits demanding applications.
Multi Axis Positioning Stages / Tables

X-Y Positioning Stage suits demanding applications.

Available in 3 sizes with travels of 110 x 110, 210 x 210, or 320 x 320 mm, KT-EDLM series delivers 3 micron positioning accuracy per 100 mm travel with repeatability of ±0.5 microns. Straightness and flatness are 2 microns per 100 mm travel, and X/Y axes are driven by synchronous, ironless, electrodynamic linear motors with max acceleration of 7-10 m/secÂ-² and velocity of 400-600...

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Vertical Lift Stage Offers 2 nm Resolution While Providing up to 5 mm of Travel
Multi Axis Positioning Stages / Tables

Vertical Lift Stage Offers 2 nm Resolution While Providing up to 5 mm of Travel

Linear-motor-driven wedge-style stage with 5 mm of vertical travel High resolution (2 nm), repeatability (100 nm), and accuracy (200 nm) In-position stability of 1 nm Anti-creep crossed-roller bearings Excellent dynamic performance Aerotech's ANT130-5-V is a linear-motor-driven wedge-style vertical lift stage that provides the exceptional resolution, accuracy, and in-position stability required...

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Motorized Stage Systems offer manual control option.
Multi Axis Positioning Stages / Tables

Motorized Stage Systems offer manual control option.

Configurable in X-Y and X-Y-Z versions, High Precision Motorized Stage Systems include stepper motor, controller that connects directly to computer RS-232 port, 15 V universal power supply, 6 ft data cable, and software. Computer-controlled systems, offering 4 travel distances from 25-200 mm, also feature optional manual control potentiometer. During manual move, stage continually transmits its...

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Single-Axis Air Bearing Stages combine performance, modularity.
Multi Axis Positioning Stages / Tables

Single-Axis Air Bearing Stages combine performance, modularity.

Suited for single-axis, split XY, and gantry applications, SinguLYS(TM) series employs stage and bridge configurations. SinguLYS S-370 stage, manufactured from silicon carbide ceramic components, has 3-point mounting and carriage that features integrated pressure-vacuum air bearings. Along with ceramic beam, SinguLYS B-1200 air bearing bridge features rigid pressure-vacuum air bearing carriage...

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