Metrology Equipment

Multi-Sensing Metrology System measures parts in one setup.

Multi-Sensing Metrology System measures parts in one setup.

SmartScope® Quest 650 utilizes multiple sensors to measure features on complex manufactured parts in one setup. Telecentric TeleStar® zoom lens has collimated profile illumination that matches aperture of optics over entire range, and thermally stable Meehanite provides measurement volume of 24 x 26 x 12 in. XYZ. Features include granite base, linear-motor-driven stages, 50 nm scale resolution,...

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Positioning Platform is suited for 300 mm wafer metrology.

Positioning Platform is suited for 300 mm wafer metrology.

Featuring 3-plate design and direct-drive rotation, ISM300 low-profile, integrated XY-Theta positioning platform achieves total surface access on 300 mm wafers. Maintaining constant orientation of patterned elements on wafer relative to measurement optics, integrated metrology platform achieves linear speeds to 300 mm/sec and combined XY-Theta repeatability of less than ±0.5 microns. Features...

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Metrology Bath provides stability of ±0.005°C at -40°C.

Metrology Bath provides stability of ±0.005°C at -40°C.

Model 7340 covers temperatures from -40 to 150°C, and can be used as standard for calibrating reference-grade thermometers. Unit includes RS-232 interface and Hart's Interface-it software for automating control of bath through PC. Quick drain spout is included so fluids covering different temperature ranges can be easily changed if necessary. Optional floor cart is available for mobility.

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Metrology System offers rapid measurement cycles.

LTD800 Laser Tracker provides portable coordinate measurements at 3000 points/second and distances from 0 to 131.234 ft. Programmable open client/server interface provides customized data processing and enables users to completely automate inspection process. Laser tracking technology is used to set up, measure, and inspect assembly tooling details and part mating procedures.

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Metrology Instrument measures surface forms.

Tropel FlatRuler(TM) 200 provides non-contact optical surface form measurements of flat surfaces on ground, blanked, stamped, turned, or molded components. Instrument's fringe projection illuminates entire surface of object, allowing non-contact, 3-D measurements of up to 250,000 data points with accuracy to 5 microns. Each system includes high-resolution color monitor, high-speed color inkjet...

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Measurement System features TeleStar(TM) optics.

Measurement System features TeleStar(TM) optics.

SmartScope® Quest 600 multi-sensor dimensional metrology system (video, laser, touch probe) performs precision measuring of small parts, carriers of small parts, or parts as long as 24 in. Its high contrast image has virtually zero distortion. Lens is telecentric and has collimated profile (episcopic) illumination that matches optic aperture over 10x range. Granite bridge construction provides...

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