Emissometers

New Emissometer Performs In-Depth Analysis

New Emissometer Performs In-Depth Analysis

Designed to generate high-resolution diffuse and specular reflectance and total emissivity maps of MOCVD carriers. Displays the number of defects it detected and summarizes the number of the pocket, web and halo-region defects. Early defect detection and detects quality issues before shipping the carrier to end user.

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Advanced Energy® to Feature Award-Winning Aera® EPV Exhaust Pressure Controller for Advanced Processes at SEMICON® Japan 2006

Visit AE at SEMICON Japan Hall #4, Booth 4B-501 AE also showcasing Litmas(TM) Remote Plasma Source Platform and Navigator® Digital Matching Network HACHIOJI, Japan, November 28, 2006-Advanced Energy K.K. today announced that it will feature its Aera® EPV-100AW exhaust pressure controller during SEMICON® Japan 2006. The company also will showcase its Litmas(TM) RPS 1501 and 3001 remote plasma...

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Optic Fiber Thermometers target semiconductor processes.

Designed for RTP, HDP-CVD, epi, ALD, and HDD applications, Model OR4000T provides multi-channel temperature measurement and enables integrated measurements within multiple chambers. Model OR4000E offers same performance with added real-time emissivity compensated temperature measurement and ability to support growth rate monitoring. Single-channel Model OR400T provides non-contact, in-situ...

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