Deposition Systems

Deposition Tool suits low-defect thin film markets.

Flexible dual-ion beam reactive-sputtering tool provides platform for multi-layer film development as well as tightly controlled production deposition. Low-defect, high-uniformity tool incorporates multi-axis substrate/sputter target relative positioning control, 4-material target tooling, substrate rotation speed control, and high order polynomial process variable control. It is suited for...

Read More »
Deposition Tool can be expanded and reconfigured.

Deposition Tool can be expanded and reconfigured.

AXXIS modular, thin-film deposition tool supports processes such as sputtering, thermal evaporation, electron beam evaporation, PECVD plasma, and ion cleaning. It can heat, cool, and rotate variety of substrates and is offered in both manual and computer controlled versions.

Read More »

All Topics