Wafer Scribing Systems deliver 12-14 wafers/hr.
Press Release Summary:
Suited for demanding 24/7 production-line environments, semi-automated AccuScribe 2112 features automated alignment, positioning, focus, and partial wafer scribing, while fully automated AccuScribe 2150 includes automated loading and unloading of wafers from and to cassettes, eliminating need for operator. Both systems utilize UV DPSS laser technology and advanced optical and image processing technologies. They include wafer edge detection and backside alignment capability.
Original Press Release:
New Wave Research, Inc. Introduces New Platform with Fastest Throughput in the HBLED Laser Scribing Industry
The AccuScribe 2112 and AccuScribe 2150 feature highest throughput on the market and automated operation
Fremont, Calif., July 17, 2007 - New Wave Research, Inc., a leading manufacturer of lasers and laser-based systems for the microelectronics and analytical instrumentation industries, today debuts the AccuScribe 2112 and AccuScribe 2150 high-speed wafer-scribing systems. Each system leverages patented AccuScribe technology to deliver unprecedented 12 to 14 wafer-per-hour throughput - a 20% or greater speed increase over their acclaimed predecessor, the AccuScribe AS2000FX. Each system also features high levels of automation. The semi-automated 2112 features automated alignment, positioning, focus and even partial wafer scribing. The operator need only load the wafers into and out of the scriber. The fully-automated 2150 is nearly identical to the 2112, but also includes automated loading and unloading of the wafers from and to their cassettes. In fact, the 2150 completely eliminates the need for an operator. Further, both systems feature an exceptionally rugged and customizable platform optimized for demanding 24/7 production-line environments.
"The AccuScribe 2112 and AccuScribe 2150 will make a dramatic impact on the productivity and efficiency of any production house," said Pete Manautou, product manager with New Wave Research. "In addition to blazing-fast 12 wafer-per-hour throughput, automation will significantly reduce man hours, minimize human error and boost overall process uniformity. Moreover, there's very little operator training or specialized skill necessary - users just program-in their scribing parameters, and they're set to go. Production houses will be very pleased with the long-term ROI and CoO these systems represent."
High-speed performance is achieved via the latest in high-efficiency, high-stability, UV DPSS laser technology and New Wave Research's advanced optical and image-processing technologies. The industrial platform provides four-inch wafer support capability and is easily customized for various customer requirements. In addition, each platform provides many advanced features to enhance customer work efficiency.
This includes a highly accurate, repeatable and reliable X-Y stage, user-selectable energy output with stability feedback loop, advanced debris removal system and many other options to increase ease-of-use and productivity.
Each model also includes performance-enhancing features such as a patented wafer edge detection system that enables the operator to scribe every inch of precious wafer real estate and scribe partial or broken wafers - very important to customers as it dramatically increases yields. Also, backside alignment capability - another feature unique to the AccuScribe - enables scribing from the backside of wafers when opaque wafer materials make topside alignment and scribing impossible. A single operator can easily perform all scribing operations; this is assured via an intuitive and easy-to-use LCD-screen GUI, adjustable LCD panel and an industrial-grade computer system.
Established in 1990, New Wave Research, Inc. is a global leader in the development of high-quality lasers and laser-based systems for the microelectronics and analytical instrumentation industries. New Wave Research manufactures lasers and systems for wafer scribing, flat-panel display repair, semiconductor failure analysis, micromachining, particle image velocimetry, laser ablation/solid sampling for ICP/ICP-MS, laser-induced-breakdown spectroscopy (LIBS) and general-purpose lasers for OEM and scientific applications.
For more information, contact New Wave Research, Inc., 48660 Kato Rd., Fremont, CA 94538, lasers@new-wave.com, (510) 249-1550. Web: www.new-wave.com
