Wafer Handling Module suits semiconductor process tools.
Share:
Press Release Summary:
Apex platform combines direct-drive AWARD wafer handling robot with SmartServo distributed controls architecture based on IEEE-1394 serial bus. It handles wafer sizes up to 300 mm, configurable with any combination of open cassette, SMIF, and FOUP loadports. SmartController provides direct interface to existing process tools via ASCII and GEM/SECS command interfaces. System supports vacuum and edge-grip end-effectors, thru-beam wafer mapping, and wafer alignment.
Original Press Release:
Adept Technology Announces New Low Cost Wafer Handling Equipment Front-End Module (EFEM) for Semiconductor PROCESS TOOLS
New Adept Apex* EFEM Platform Reaches New Industry Cost Levels with Adept AWARD robot and Adept SmartServo Distributed Controls Architecture
Livermore, California - September 30, 2003 - Adept Technology, Inc. (OTCBB: ADTK.OB), a leading manufacturer of flexible automation for the semiconductor, electronics, automotive, fiber optic, telecommunications, and life sciences industries, today announced its new low cost wafer-handling module for semiconductor process tools. The Adept Apex* wafer handling platform combines Adept's new direct-drive AWARD* wafer handling robot along with the Adept SmartServo* distributed controls architecture to provide an automated wafer handling platform that is easier for equipment providers to integrate, support and adapt for future automation needs. The Adept Apex platform is capable of handling wafer sizes up to 300 mm, configurable with any combination of open cassette, SMIF and FOUP loadports.
"The market is demanding a wafer handling platform that is lower cost, simpler to understand and support, but that can easily be adapted to meet a customer's unique requirements", said Charlie Duncheon, executive vice president of Adept Technology, Inc. "We believe the Adept Apex EFEM platform meets all these needs with standard Adept robots and software and our easily expandable, FireWire*-based, controls architecture that allows plug-and-play addition of machine vision, digital and analog I/O, and servo axis control."
The Adept Apex EFEM wafer handling platform includes the Adept AWARD robot and supports vacuum and edge-grip end-effectors, thru-beam wafer mapping, wafer alignment, wafer ID and contamination controls in one tightly integrated SEMI compliant package. The highly flexible and powerful Adept SmartController* provides direct interface to existing process tools via ASCII and GEM/SECS command interfaces and features additional functionality with Ethernet, integrated vision, DeviceNet, serial/Ethernet/IEEE 1394 communications, digital and analog I/O interfaces.
The Adept AWARD* robot has all amplifier electronics built into the base of the robot, greatly reducing wiring, and simplifying installation and maintenance. The Adept AWARD robot also employs direct drive motors and direct-coupled encoders that enable high performance servo control and eliminates performance degradation and reliability problems over the life of the robot. The robot's high-resolution absolute encoders eliminate homing on all axes and provide maintenance-free operation because encoder backup batteries are no longer required.
The Adept SmartServo* architecture is based on the high-speed IEEE-1394 serial bus (FireWire*) and offers simplified automation scalability because the controls components are mounted at the point-of-use rather than in a centralized cabinet, resulting in less space usage, reduced cabling, improved reliability and cost.
Adept Technology designs, manufactures and markets factory automation components and systems for the fiber optic, telecommunications, semiconductor, automotive, food and durable goods industries throughout the world. Adept's robots, controllers, and software products are used for small parts assembly, material handling and ultra precision process applications. Our intelligent automation product lines include industrial robots, configurable linear modules, flexible feeders, semiconductor process components, nanopositioners, machine controllers for robot mechanisms and other flexible automation equipment, machine vision, systems and software, application software, and simulation software. Founded in 1983, Adept is America's largest manufacturer of industrial robots. More information is available at www.adept.com.
