Vertical Stage targets wafer positioning applications.
Press Release Summary:
Made from stable aluminum alloy, Model HT 03-LM offers travel of 3 mm with accuracy of 2 microns and repeatability of 20 nm. It uses piezo linear motor to drive 10:1 ratio wedge, and crossed roller bearings for smoothness of motion. Maximum speed is 25 mm/sec and position feedback is provided by precision linear encoder with 0.1 µm resolution. Stage is suited for semiconductor, fiber optic, medical/life sciences, optical, laser systems, and robotics industries.
Original Press Release:
New Precision Vertical Stage
BURLINGTON, MA, APRIL 4, 2006 --Steinmeyer, Inc. announced a new vertical positioning stage manufactured by its FMD division. The model HT 03-LM offers a travel of 3 mm with accuracy of 2 microns and repeatability of 20 nanometers, making it ideal for wafer positioning! A compact piezo linear motor is used to drive a 10:1 ratio wedge. Precision crossed roller bearings ensure smoothness of motion and high rigidity. Manufactured from stable aluminum alloy, the HT 03-LM weighs only 3.6 kg, but can handle loads up to 200 Newtons! Maximum speed is 25 mm/sec and position feedback is provided by a precision linear encoder with 0.1 um resolution. Extra cost options include preparation for high vacuum and clean room operation.
This stage is ideal for applications in the Semiconductor, Fiber Optic, Medical/Life Sciences, Optical, Laser Systems and Robotics industries.
The Steinmeyer group is comprised of three manufacturing divisions located in Germany. August Steinmeyer GmbH & Co. KG (located in Albstadt) has been setting standards for high precision ballscrews for over 40 years and prides itself on high quality, innovative designs to meet demanding customer requirements. Our Feinmess Dresden (FMD) division has been producing an extensive line of high precision positioning systems for well over 130 years.
For further information on this new product or others in our extensive product portfolio call 1-781-273-6220 or visit the Steinmeyer FMD group at the following web site: www.feinmess.de
