Vacuum Pump works at variable pumping speeds.

Press Release Summary:

Inverter equipped DYM series high speed dry vacuum pump provides pumping speeds from 330 to 1,200 m3/hr. It combines company's DR-C series dry pump and PRC-A series mechanical booster pump. Pumps are close coupled inside enclosed frame for CVD and etch applications, and unit is coated with TUFRAM(TM) for resistance to corrosive chemicals and wear. It has control system, RS232C interface, and handheld controller with bilingual display.

Original Press Release:

ULVAC Technologies, Inc. Offers High-Speed DYM Vacuum Pump

Ideal for CVD and Etch Applications

Methuen, Mass. - ULVAC Technologies, Inc. (, a leading supplier of production systems, instrumentation, and vacuum pumps for the semiconductor industry, introduces its DYM series high-speed dry vacuum pump -- a combination of ULVAC's DRYMAC PDR-C series dry pump and its PRC-A series mechanical booster pump. These two pumps are close coupled together inside an enclosed frame to create an efficient, compact, and cost-effective dry pump/booster package for CVD and etch applications. The all-aluminum DYM pump features an advanced multi-stage Roots pump as the primary dry pump, and a conventional Roots blower mechanical booster pump.

Uniform pump temperatures help prevent condensable process gas byproducts from adhering to the internal pumping surfaces. In addition, the entire unit is coated with TUFRAM(TM) for enhanced resistance to corrosive chemicals and wear. ULVAC's modern, compact pumps use canned motors for leak tightness and are equipped with a microcomputer control system that monitors pump status and set-point alarms via an RS232C interface and a handheld controller with bilingual display (English and Japanese).

The DYM pump is also inverter equipped, which allows precise control of pumping speeds, in the range from 330 m3/hr to 1,200m3/hr.

About ULVAC Technologies. Inc.
Founded in 1992, ULVAC Technologies, Inc. is a leading supplier of production systems, instrumentation, vacuum pumps and components for the semiconductor, automobile, medical, electrical, gas and petroleum, and refrigeration industries. ULVAC Technologies uses a class-10 process development laboratory and customer demonstration facility to meet the unique needs of their different markets. ULVAC Technologies is a subsidiary of ULVAC Inc., which is comprised of 36 companies engaged in all sectors of the vacuum industry.

For more information, contact ULVAC Technologies, Inc., 401 Griffin Brook Drive, Methuen, MA 01844; p: 978-686-7550; f: 978-689-6300; email: Information is also available on the company's web site at

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