Vacuum Pump suits load lock and transfer chamber applications.
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Press Release Summary:
Designed to meet Applied Materials' specification for load lock and transfer chamber pumping, IPUP2™ achieves pumping speed of 180 m³/h. Precision bearings throughout pump ensure smooth, low vibration operation, while oil lubrication of bearings and timing gears eliminates need for routine maintenance between major overhauls. Equipped with horizontal and vertical inlets, IPUP2 provides MTBF of 5+ years with over 3,000,000 load lock cycles.
Original Press Release:
Edwards' IPUP2 Vacuum Pump Sets New Standards for Load Lock and Transfer Chamber Applications
Advanced design of 2nd generation pump achieves early success.
CRAWLEY, WEST SUSSEX, UK. – Edwards Group Limited (NASDAQ: EVAC), a leading manufacturer of sophisticated vacuum products and abatement systems and a global provider of related value-added services, has introduced a new integrated point-of-use pump, the IPUP2™, for load lock and transfer chamber applications on Applied Materials’ manufacturing platforms. The 2nd generation pump offers significant advantages in load lock pump down time, energy consumption and maintenance requirements that together, deliver best-in-class performance and cost-of-ownership. The pump has achieved early success, with qualification on several new Applied Materials’ platforms and initial shipments of over 180 systems to major semiconductor manufacturers.
“We worked very hard to meet and exceed Applied Materials’ requirements for this new generation of pumps,” said Mark Greene, General Manager of Sales, Edwards. “Its advanced design reduces pump down times by about 50 percent, it uses 70 percent less energy and requires no maintenance between overhauls. Semiconductor manufacturers – even those who have a long history with competitive suppliers – have been quick to acknowledge the IPUP2 throughput and cost-of-ownership benefits with hard orders.”
The IPUP2 was designed to meet Applied Materials’ specifications for load lock and transfer chamber pumping. The pumping speed and power curve of the IPUP2 have been optimised to increase tool throughput, achieving a peak pumping speed (180 m3/h) 89 percent faster and pump down times up to 54 percent faster than 1st generation pumps, while using 70 percent less energy (additional energy savings can be achieved using Green Mode). Precision bearings throughout the pump ensure smooth, low vibration operation, while oil lubrication of bearings and timing gears eliminate the need for routine maintenance between major overhauls. The IPUP2 includes horizontal and vertical inlets and its size and configuration permit direct swaps with previous generation pumps. In testing, the pump scored highly with a mean time between failures (MTBF to Semi E10 standards) of over five years with in excess of 3,000,000 load lock cycles.
The IPUP2 is available now on Applied Materials’ tools or directly from Edwards. For further information, please contact your local sales representative.
About Edwards
Edwards is a leading developer and manufacturer of sophisticated vacuum products, abatement systems and related value-added services. These are integral to manufacturing processes for semiconductors, flat panel displays, LEDs and solar cells; are used within an increasingly diverse range of industrial processes including power, glass and other coating applications, steel and other metallurgy, pharmaceutical and chemical; and for both scientific instruments and a wide range of R&D applications.
Edwards has over 3,200 full-time employees and 500 temporary workers operating in approximately 30 countries worldwide engaged in the design, manufacture and support of high technology vacuum and exhaust management equipment.Â
Edwards’ American Depositary Shares trade on The NASDAQ Global Select Market under the symbol EVAC. Further information about Edwards can be found at www.edwardsvacuum.com.Â
