Vacuum Pump Inlet Trap suits 300 mm wafer fabricators.
Press Release Summary:
Constructed of 304 stainless steel, high-capacity MV Multi-Trap® 16 in. vacuum inlet trap accumulates up to 2,500 cu in. of solids. Featuring first stage knock-down baffle, trap can be stacked with up to 6 stages of replaceable 4.5 or 9 in. tall filters. Filter options include stainless steel gauze, micro-rated polypropylene, activated alumina, charcoal, Sodasorb®, as well as other types to remove residual solvent vapor acids and particulates.
Original Press Release:
Vacuum Pump Inlet Trap Designed for 300 mm Wafer Fabricators
A new generation vacuum pump inlet trap for larger process tool forelines used by 300 mm wafer fabricators and processes such as LPCVD, PECVD, and ALD is being introduced by MV Products of North Billerica, Massachusetts.
The MV Multi-Trap® 16" Vacuum Inlet Trap is designed for protecting vacuum pumps in processes which generate a large quantity of heavy particulates and features a first stage knock-down baffle and multiple stages of filtration. Suitable for 300 mm semiconductor wafer fabricators, this high-capacity trap can be stacked with up to six stages of user-specified replaceable filter elements to achieve optimum filtration efficiency for a given application.
Incorporating a modular, clamp-together design for ease of maintenance,
the MV Multi-Trap® 16" Vacuum Inlet Trap is constructed from 304 stainless steel. Capable of up to 2,500 IN3 of solids accumulation, depending upon material, filter options include stainless steel gauze, micro-rated polypropylene, activated alumina or charcoal, Sodasorb® and other types to remove residual solvent vapor acids and particulates. Filters offered are 4.5" and 9" tall.
The MV Multi-Trap® 16" Vacuum Inlet Trap is priced from $4,700.(list) depending upon configuration. Quotations are available upon request.
For more information contact:
MV Products, Division of Mass-Vac, Inc.
Herbert R. Gatti, Marketing
247 Rangeway Rd. / P.O. Box 359
No. Billerica, MA 01862-0359
(978) 667-2393 FAX (978) 671-0014
e-mail: drolph@massvac.com (tech contact)
www.massvac.com
