Vacuum Pump eliminates need for cables and accessory rack.
Press Release Summary:
Rated at 2,200 L/sec, iXA(TM) series of turbomolecular vacuum pumps exhaust process gases from physical vapor deposition, etching, chemical vapor deposition, or ion implant equipment in semiconductor, flat panel display, solar energy, and industrial glass coating applications. Pump includes 5-axis magnetic bearing system and RS232/485 (Profibus) serial communication interfaces. Unit features power supply and control modules that can be mounted in various configurations directly on pump.
Original Press Release:
Edwards Announces New iXA(TM) Turbomolecular Vacuum Pump
Innovative design provides flexible configuration and eliminates cables and accessory rack
TOKYO, JAPAN (5 December, 2007)-Edwards, a leading supplier of vacuum, abatement and chemical management equipment and services, today announced its new iXA(TM) series of magnetic bearing turbomolecular vacuum pumps. The iXA pumps exhaust process gases from physical vapor deposition, etching, chemical vapor deposition, or ion implant equipment in semiconductor, flat panel display, solar energy and industrial glass coating applications.
The new iXA family of pumps provides industry-leading performance. They feature power supply and control modules that can be mounted in various configurations directly on the pump, or remotely, eliminating cables and accessory racks while still preserving the flexibility to fit a wide range of equipment.
"Large, industrial scale systems can require a large number of pumps," said Naoki Matsuba, President, Edwards Japan. "Eliminating accessory racks and all the cables, saves space and reduces the complexity of the system. At the same time, the flexibility to mount the power supply below, on the side, or remotely, allows the pump to meet the space constraints imposed by the equipment. The pump and controller together are virtually the same height as the previous generation pump alone. This can be especially important in retrofit applications where the turbo pump is replacing some other pumping technology."
The first pump in the iXA family is rated at 2200 liters per second-larger sizes are planned for future development. The pump's five-axis magnetic bearing system and new motor and drive system ensure long life and low operating costs with maintenance intervals as long as five years. Water and dust proof (IP54), and temperature management configurations are available. All pumps include RS232/485 (Profibus) serial communication interfaces.
The iXA pumps will be showcased at Edwards booth 4A-505 during SEMICON® Japan, taking place December 5-7, 2007 at Makuhari Messe, Chiba, Japan.
About Edwards
Edwards (formerly BOC Edwards) is a leading supplier of integrated solutions for the manufacture of semiconductors, flat panel displays, LEDs and solar cells. It is also a world leader in vacuum technology for industrial, scientific, process and R&D applications. Edwards employs around 4,000 people globally in the design, manufacture and support of high technology vacuum and abatement equipment. Edwards invented the concept of the low-maintenance, cost-effective commercial oil-free 'dry' vacuum pump, and now supplements this with a wide range of other pumping technologies as well as related products and services. For more information, visit www.edwardsvacuum.com
