Methuen, Massachusetts - ULVAC Technologies, Inc. has sold a high throughput Enviro-Optima™ Resist Strip and Residue Cleaning System to a U.S. MEMS manufacturer. The system, built in Massachusetts, will be installed this spring at the MEMS manufacturer's facility. The customer evaluated the Enviro-Optima™ system at the ULVAC Applications Lab in Methuen, MA and has successfully converted their ashing process to the ULVAC system.
"As MEMS becomes an integral part of the Internet of Things, ULVAC is delivering advanced production tools and effective solutions to meet the ever growing MEMS demand," commented Ryoshin Imai, Senior Director, Marketing and Business Development.
The ULVAC Enviro-Optima™ Resist Strip System provides the highest throughput per square meter of cleanroom space at the lowest cost. It features a remote plasma source capable of achieving extremely quick resist removal rates of >10µm/min. The Enviro-Optima™ system can handle 100mm, 150mm, 200mm, and 300mm wafers. Combined with fast wafer handling robotics, the Enviro-Optima™ system's design results in the highest throughput with the smallest footprint (67 wph/m2) for systems under $1 million. With less cleanroom space required, and lower price than other models, this resist strip system delivers the lowest cost of ownership. The Enviro-Optima™ system is well suited for all resist strip work including difficult to strip resists, like SU-8; residue removal and surface preparation applications.
About ULVAC Technologies, Inc.
ULVAC Technologies, Inc. is a leading supplier of thin film production systems, thermal instrumentation, vacuum pumps and components for the semiconductor, solar, flat panel display, research, automotive, medical, electrical, and refrigeration industries. ULVAC Technologies uses a class-10 process development laboratory and customer demonstration facility to meet the unique needs of their different markets. ULVAC Technologies is a subsidiary of ULVAC, Inc., which is made up of more than 50 companies engaged in most sectors of the vacuum industry.
For more information about the Enviro-Optima™ Resist Strip and Residue Cleaning System, contact ULVAC Technologies, Inc., 401 Griffin Brook Drive, Methuen, MA 01844; phone: 978-686-7550, fax: 978-689-6300; www.ulvac.com; email: email@example.com
ULVAC - Enviro-Optima™
401 Griffin Brook Drive
Methuen, MA 01844