Turning Mirror Mount is designed for UV laser processing.
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Press Release Summary:
Able to hold sub-micrometer accuracy, industrial-grade vacuum UV product turns 157, 193, or 248 nm UV excimer laser beam at 90° angle and directs it through beam delivery system. Gimbal-mounting enables turning mirror to pivot exactly at front surface, providing zero crosstalk between X and Y adjustment axis. Turning mirror front surface is located in spring-loaded pre-mount, and module features 50 x 50 mm clear aperture in addition to rectangular format mirror.
Original Press Release:
JPSA Introduces Large-diameter Turning Mirror Mount
Hollis, New Hampshire, USA -- J P Sercel Associates (JPSA) announces the introduction of a new large-format turning mirror mount for UV laser processing. The new mount is an industrial-grade vacuum UV (VUV) product designed to turn a UV excimer laser beam at a 90-degree angle and direct it through a beam delivery system (BDS). Because it is a vacuum (VUV) product, it can be used with short-wavelength UV excimer beams including 157nm, 193nm, and 248nm. The turning mirror is gimbal-mounted, such that the turning mirror pivots exactly at its front surface, which provides zero crosstalk between the X and Y adjustment axis. There is no grease or oil in any of JPSA's VUV beam delivery designs, and all organic materials have been removed to prevent degradation by UV radiation and consequent contamination of the optics and interior chamber. The absence of such contaminants contributes to longer optics life. JPSA's turning mirror mount can be purged with high-purity gases such as nitrogen.
The turning mirror is front surface located in a spring-loaded pre-mount to give low stress and stability to the mirror, as well as easy serviceability and fast access. The module features a 50mm x 50mm clear aperture and rectangular format mirror, which allows passage of a larger-diameter homogenized beam without beam corner clipping.
JPSA's new large-diameter turning mirror mount is equipped with high-sensitivity differential micrometers, separated by a high-purity nickel bellows so that there is no possibility of micrometer grease contaminating the module's optics, a sealed configuration. The mirror mount is designed to hold sub-micron tolerances in a 24/7 industrial production environment.
JPSA products and services include UV excimer and DPSS laser micro machining systems, UV and VUV laser beam delivery systems, UV laser materials processing development, optical damage testing, and excimer laser refurbishment services. JPSA Laser operates a high-performance UV laser job shop as well as a systems engineering and manufacturing business. For more information, visit www.jpsalaser.com, or contact the company at 17D Clinton Drive, Hollis, NH 03049 USA, Tel. 603.595.7048, fax 603.598.3835. E-mail: info@jpsalaser.com.
