Turbomolecular Pumps feature ceramic bearings.

Press Release Summary:

Available with optional on-board controller, EBT Series offers solution for high vacuum pumping needs found in manufacturing, semiconductor, thin film, and photovoltaic industries. Pumps can be mounted in any orientation and have tuning-free half rack controllers requiring no battery backup. Naturally cooled, fan-cooled, and water-cooled models are available.

Original Press Release:

EBARA's New Ceramic Bearing Turbo Pumps

EBARA Technologies, Inc. Launches the New EBT Series Turbomolecular Pumps Products

Sacramento, California - EBARA Technologies, Inc., a leading manufacturer in the semiconductor industry for dry pumps, vacuum components, and services is proud to announce the new EBT Series of Turbomolecular Pumps.

The EBT Series of Ceramic Bearing Turbomolecular pump line compliments EBARA's existing offering of turbomolecular pump systems. The EBT Series are a highly efficient cost effective solution to your high vacuum pumping needs. EBARA's EBT Series turbomolecular pumps offer ceramic bearings, which provides for a clean, reliable vacuum for today's high-tech manufacturing, semiconductor, thin film, and photovoltaic industries. The EBT Series pumps can be mounted in any orientation and have tuning-free half rack controllers requiring no battery backup. The EBT Series offers three major types of turbomolecular pumps cooling: naturally-cooled, fan-cooled and water-cooled. EBARA also offers the EBT turbomolecular pumps with an optional On-Board controller.

To request additional information on the EBT Series turbomolecular pumps or any other Ebara product, please click here or call 800-535-5376.

About EBARA Technologies, Inc.:

EBARA Technologies, Inc. is a U.S. based subsidiary of EBARA Corporation Precision Machinery Company, a Japanese company founded in 1912, which provides a wide range of technologies including equipment, systems and services for water, air and the environment. EBARA is a leading global innovator and worldwide supplier of vacuum technologies and advanced wafer-processing equipment for clean environments within the semiconductor industry. EBARA components division manufactures a full line of Dry Mechanical Pumps, Magnetic levitation Turbo and Hybrid Turbomolecular Drag Pumps. The company's offerings also include a complete line of Vacuum Valves and Fittings, Heaters for vacuum and exhaust lines, Point-of-Use Abatement systems, Ozonized water and gas equipment. EBARA's systems Division, manufactures Chemical Mechanical Polishers (CMP). EBARA Chemical Plating Systems (ECP), and Through-Mask Plating Systems (ThMP). EBARA maintains a superior sales and support network in the U.S. and worldwide. Additional information about EBARA Technologies, Inc. can be found at www.ebaratech.com.

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