Press Release Summary:
Series 925C MicroPiraniÂ® Transducer is a thermal conductivity gauge with pressure measurement range from 10-5 Torr to atmosphere. Sensor element consists of 1 mmÂ² silicon chip, allowing measurements to be made in very small volume. MEMs-based tranducer includes RS485 or RS232 digital communications, allowing for adjustments and monitoring to be delivered in real-time via host computer. Common gas calibrations can be selected via digital interface.
Original Press Release:
MKS Releases New MicroPiran®i Transducer
Boulder, Colorado, April 15, 2004 - MKS Instruments, Inc., (Nasdaq: MKSI), a leading provider of process control technologies for improving productivity in semiconductor and other advanced manufacturing processes, announces the release of the HPS® Series 925 Compact (925C) MicroPirani® Transducer. The MEMs-based 925C is a thermal conductivity gauge and incorporates MKS' patented MicroPirani® sensor technology in a compact package. The 925C features an increased pressure measurement range from 10-5 Torr to atmosphere - two decades below a standard Pirani sensor. ensor technology in a compact package. The 925C features an increased pressure measurement range from 10-5 Torr to atmosphere - two decades below a standard Pirani sensor. MKS Instruments will be demonstrating the Series 925C at SEMICON West 2004, Booth #1716.
The sensor element of the MicroPirani(TM) is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. The MicroPirani's design minimizes the effects of convection, and can be mounted in any position without compromising accuracy, for simplified installation.
The 925C transducer includes RS485 or RS232 digital communication as a standard feature, allowing for all adjustments and monitoring to be delivered real-time, via a host computer. For process control, the 925C has one independent setpoint relay which can be set, adjusted and monitored through the digital port.
Like all thermal conductivity sensors, the Series 925C is gas-type sensitive; therefore, it has a number of common gas calibrations that can be selected via digital interface.
For more information contact MKS Instruments, HPS Products at (800) 345-1967 or (303) 449-9861, or visit our web site at www.mksinst.com to download literature and drawings.
MKS Instruments is a leading worldwide provider of process control solutions for advanced manufacturing processes such as semiconductor device manufacturing and thin-film manufacturing for flat panel displays, optical storage media, architectural glass and electro-optical products. We also provide technology for medical imaging equipment.
Our instruments, components and subsystems incorporate sophisticated technologies to power, measure, control and monitor increasingly complex gas-related semiconductor manufacturing processes, thereby enhancing our customers' uptime, yield and throughput, and improving their productivity and return on invested capital.