Universal Process / Temperature Controllers
Temperature Controller offers EtherCAT connectivity.
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Press Release Summary:
Equipped for high-speed data exchange and EtherCAT® network integration, MultiTherm 1000 features 16 sensor input channels, accepting RTDs and thermocouples, and 16 PWM output channels with built-in SSRs for up to 2 A, 220 Vac. Standard features include PID, heater diagnostics, safety interlocks, and heater power routing with internal fusing. Suited for semiconductor, solar, and MOCVD equipment, controller provides all necessary means for uniform temperature control across multiple zones.
Original Press Release:
MKS Instruments Introduces MultiTherm Temperature Control Line EtherCAT® Enabled Multi Zone Control
Andover, MA — MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has introduced the MultiTherm 1000 temperature controller, an all-in-one solution for semiconductor, solar and MOCVD equipment. It features 16 precision sensor input channels accepting RTDs and thermocouples, and provides 16 PWM output channels with built-in SSRs for up to 2A, 220VAC. Built-in PID makes the unit ideal for dynamic control applications where extreme temperature stability is required.
The first in the MultiTherm line and latest addition to the MKS control platform family, the MultiTherm 1000 is offered with EtherCAT® connectivity to provide high-speed data exchange and seamless integration into an EtherCAT network. In addition, MultiTherm features heater diagnostics which provide an alarm for heater failure or degradation to reduce the chance of costly process damage. Its safety interlocks allow the integration of over-temperature and EMO switches into the system. Its heater power routing with internal fusing is a cost reducing feature that eliminates the need for additional hardware. The unit features front panel LED indicators for individual channels.
The MultiTherm 1000 is offered in a compact, DIN rail mountable package with quiet fanless operation. The unit provides all the necessary means for highly uniform temperature control across multiple zones while minimizing system cost and real estate.
EtherCAT® is a trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.
About MKS:
MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, and vacuum technology. Our primary served markets are manufacturers of capital equipment for semiconductor devices, and for other thin film applications including flat panel displays, solar cells, light emitting diodes, data storage media, and other advanced coatings. We also leverage our technology in other markets with advanced manufacturing applications including medical equipment, pharmaceutical manufacturing, energy generation, and environmental monitoring.
