TechniEtch TBR19 Aqueous Etchant is fluoride free.
Press Release Summary:
With consistent yield in packaging applications, TechniEtch TBR19 is designed to selectively remove titanium or titanium alloy barrier layers in semiconductor fabrication and packaging applications. Demonstrating high selectivity for Ti or Ti alloys, unit results in significant reduction in undercut of less than 200 nm in Cu pillar applications. Featuring tunable etch rate with long process life, device is used in variety of industrial tool platforms.
Original Press Release:
Technic Releases TechniEtch TBR19
High-performance etchant for selective removal of Titanium and Titanium Alloys
Technic is pleased to announce the release of TechniEtch TBR19, a fluoride free, aqueous etchant designed to selectively remove titanium or titanium alloy (TiN, TiW) barrier layers in semiconductor fabrication and packaging applications. TBR19 has demonstrated extremely high selectivity for Ti or Ti alloys over copper, resulting in a significant reduction in undercut (less than200 nm) in Cu pillar applications. TBR19 also features a tunable etch rate with a long process life, thereby improving quality, reducing cost, and ensuring consistent yields in leading edge packaging applications. TechniEtch TBR19 has been used successfully in a variety of industrial tool platforms.
“We are pleased with the enthusiastic response of customers to the introduction of TechniEtch TBR19. Several high volume wafer manufacturers have already transitioned their production processes to TBR19 while a number more are finalizing their evaluations. Technic is actively expanding our manufacturing of TBR19 globally to meet rising demand.”
– Anthony Gallegos, Global Semiconductor Product Manager
Learn more about TechniEtch TBR19.
About Technic
Technic Inc. is a Rhode Island based, privately held corporation with over 900 employees worldwide. For 70 years, Technic has been a global supplier of specialty chemicals, custom finishing equipment, engineered powders, and analytical control systems to the electronic component, printed circuit board, semiconductor, industrial finishing and decorative industries. Technic is also a major supplier of engineered metal powders to the solar industry.
Learn more at www.technic.com or contact us at (401) 781-6100.
Release Contact:
Bob Sheeran
401-785-8763.
