Swagelok Introduces Thermal-Immersion Diaphragm Valves for Semiconductor Manufacturing

SOLON, Ohio (July 15, 2008)- Designed for high-temperature processes, Swagelok® thermal-immersion diaphragm valves feature high-speed actuation and are fully immersible at temperatures up to 220°C (428°F). With flow coefficients up to 0.60, the valves are ideal for rapid thermal processing, precursor delivery applications, and deposition processes, including atomic layer deposition (ALD).

A fully contained high-purity grade PFA seat offers compatibility with a wide range of chemistries, including advanced liquid and solid source materials such as zirconium and hafnium. The seat design also provides excellent resistance to swelling and contamination during processing.

With a fully swept flow path, the valves minimize entrapment areas, facilitate purging and maximize flow capacity. The fully swept flow path is a design element shared by the Swagelok thermal-immersion diaphragm valves, DRP series and ALD valves.

The valve body is manufactured from 316L VIM-VAR stainless steel and available with a variety of 1/4 and 3/8 inch end connections, including VCR® and "H" Type VCR metal gasket face seal fittings, tube butt weld, and modular surface mount. The valves are offered in both pneumatically actuated and manual models. Pneumatically-actuated models are capable of a valve opening or closing time of less than 5 m. Manual models feature a lock-out handle.

Swagelok thermal-immersion diaphragm valves can be incorporated into a variety of platforms, including manifolds, monoblocks, and customized subassemblies.

Headquartered in Solon, Ohio, U.S.A., Swagelok Company is a major developer and provider of fluid system solutions, including products, assemblies, and services for the semiconductor, research, instrumentation, pharmaceutical, oil and gas, power, petrochemical, and alternative fuels industries. Its manufacturing, research, technical support, and distribution facilities support a global network of more than 200 authorized sales and service centers in 57 countries. For more information about Swagelok, visit the company's Web site at www.swagelok.com.

Swagelok Company
31400 Aurora Road
Solon, Ohio 44139

For more information, contact:
Theresa Polachek
Swagelok Company

Scott Hunsberger
Marcus Thomas LLC

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