Press Release Summary:
DektakÂ® 6M bench-top stylus surface profiler incorporates Low-Inertia Sensor 3 head to provide step height, surface roughness, and waviness measurements for samples up to 150 mm. Suitable for semiconductor, data storage, and industrial applications, it measures step heights on any surface with programmable stylus force down to 1 mg and Z-height capability to 1 mm. It also delivers horizontal resolution with up to 30,000 data points per scan.
Original Press Release:
Veeco Introduces Dektak 6M Stylus Profiler for Improved Surface Characterization Low-Cost Solution for Today's Measurement Challenges
Santa Barbara, CA, June 6, 2002 - Veeco Metrology Group has introduced the new Dektak® 6M bench-top stylus profiler. As the newest product in the industry-standard Dektak line of surface profilers, the stylus profiler incorporates Dektak's trademark reliability with a low inertia sensor head to provide step height, surface roughness, and waviness measurements for samples up to 150 millimeters for a wide range of semiconductor, data storage, and industrial applications.
"The key component to the new Dektak is the Low-Inertia Sensor 3 head," explains Rick Olds, Product Line Manager. "This sensor incorporates technological innovations that allow a reduction in noise and inertia as well as improved isolation and easier stylus replacement. These advances are due to the use of lighter composite materials such as carbon and titanium which reduce the scanning inertia. Electronic noise is also reduced through the use of ultra-high permeability material and the sensor design features increased magnetic shielding to isolate the electromagnetic field. Perhaps the most exciting aspect is that the improvements do not significantly increase the base price of the system. In addition to its unique combination of accuracy, ease of use, and simplicity of design, the Dektak 6M is surprisingly economical."
The Dektak 6M provides the versatility and performance required for a wide range of semiconductor, data storage, and industrial applications. It can accurately measure step heights on any surface, with a programmable stylus force down to 1 milligram and a Z-height capability up to 1 millimeter. In addition, it delivers high horizontal resolution, with up to 30,000 data points per scan. The easy-to-use Windows® based software interface allows automatic comparisons of analytical results from multiple scans, and calculations of the mean, standard deviation, and maximum/minimum.
Veeco Instruments Inc. is a worldwide leader in process equipment and metrology tools for the optical telecommunications/wireless, data storage, semiconductor and research markets. Manufacturing and engineering facilities are located in New York, California, Colorado, Arizona, and Minnesota. Global sales and service offices are located throughout the United States, Europe, Japan, and Asia Pacific. Additional information on Veeco can be found at www.veeco.com.