Simrit Introduces Bonded Gates to the Semiconductor Industry
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Unique manufacturing process allows seal profiles to be directly bonded to process chamber gates
PLYMOUTH, Mich., July 9, 2007 - Through a unique manufacturing process, Simrit has created bonded gates for the semiconductor industry. In this process, seal profiles are bonded directly to process chamber gates, allowing for less seal movement and reducing contamination in process.
Simrit, the industrial sealing products division of Freudenberg-NOK, will debut its bonded gates during the SEMICON West 2007 show in San Francisco (July 16 to 20). For more information about the new product, visit the Simrit booth (#6486, North Hall).
Simrit's bonded gates are available in a wide variety of compounds, from fluorocarbons for mild chemical process applications to advanced Simriz® perfluoroelastomers for the most aggressive and particulation-sensitive environments.
"Our new bonded gates eliminate the installation issue caused by the dynamic nature of gate applications," said Patrick Giorda, director, semiconductor market, Simrit. "The application design requires a very tight fitting o-ring to prevent premature 'pop-out.' In this application, O-rings can often be very difficult to install and, if installed incorrectly, perform poorly and cause unscheduled maintenance and possible loss of product. The introduction of Simrit's new bonded gates eliminates these issues."
In addition to increasing the ease of installation, Simrit's bonded gates eliminate the rolling, twisting and the abrasion associated with seal movement during the gate operation of standard O-ring / groove designs, as well as the costly premature seal failures due to seal "pop-out," which can occur when the gate is actuated. Additionally, bonded gates have an extended service life over O-ring / groove designs, which can extend periodic maintenance cycles and allow for more tool "up-time."
The Simrit Division is based at Freudenberg-NOK's headquarters in Plymouth, Mich. Freudenberg-NOK is part of the Freudenberg and NOK Group Companies, which have total annual sales of more than $12 billion. The global Freudenberg and NOK Group offers an extensive portfolio of precision-manufactured products for the semiconductor, aerospace, appliance, diesel engine, marine, off-highway equipment, oil and gas, and recreational vehicle markets.
For more information, visit the Simrit Web site at www.simrit.com.
