SEMITOOL Delivers Raider to Major North American IDM
Advanced Single-Wafer Cleaning Provides Leading-Edge FEOL and BEOL Processes -
KALISPELL, Mont., Sept. 15 -- Semitool, Inc. (NASDAQ:SMTL), a leading manufacturer of wafer processing equipment for the semiconductor industry, today announced the delivery of a Raider SP cleaning system to a major North American fab. The system will be used for delivery of advanced front-end of line (FEOL) and back-end of line (BEOL) processes for leading-edge, 65nm devices. The Raider SP single-wafer platform represents the state of the art in manufacturing technology, with cleaning functionality that meets the performance and productivity needs of leading integrated circuit makers and their present and next-generation technology nodes.
The Semitool Raider is the latest generation single-wafer tool that joins the company's install base of more than 2800 single-wafer chambers installed in more than 500 single wafer tools. Designed to be a versatile single-wafer platform on which the company deploys it's most advanced processes for both surface preparation and electrochemical deposition, the Raider is a highly stable automation platform and includes one of the industry's most advanced control systems. The Raider also features a flexible architecture designed to meet process and productivity needs, making it an attractive choice for leading-edge manufacturing and R&D applications.
"This Raider SP system will provide our customer with the capability to perform FEOL cleaning on advanced devices using Semitool-developed processes, and at a significant reduction in cost of ownership as compared to conventional batch cleaning technology," said Rich Frazier, Semitool product manager and FEOL business unit leader. "Additionally, this system demonstrates the unique flexibility of Semitool's Raider in that the system also has BEOL process capabilities that utilize our highly efficient Nano-MegTM megasonic cleaning technology. This combination of process capability gives our customers the flexibility to develop and deploy next-generation technologies to meet process development and integration needs."
Semitool's FEOL cleaning systems include features based on the company's patented ozone technology, as well as other processes utilizing low-cost dilute chemicals with highly efficient single-wafer delivery. Process delivery is accomplished with chambers that are optimized for a range of applications, including spray and immersion megasonics.
About Semitool, Inc.
Semitool designs, manufactures and supports highly engineered, multi-chamber, single-wafer and batch wet chemical processing equipment used in the fabrication of semiconductor devices. The company's primary suites of equipment include electrochemical deposition systems for electroplating copper, gold, solder and other metals; surface preparation systems for cleaning, stripping and etching silicon wafers; and wafer transport container cleaning systems. The company's equipment is used in semiconductor fabrication front-end and back-end processes, including wafer level packaging.
Headquartered in Kalispell, Montana, Semitool maintains sales and support centers in the United States, Europe and Asia. The company's stock trades on the Nasdaq National Market under the symbol SMTL. For more information, please visit the company's website at www.semitool.com.
Semitool is a registered trademark of Semitool, Inc.
Contacts:
Semitool, Inc. Pfeiffer High Investor Relations, Inc.
Dana Scranton Geoff High
406.752.2107 303.393.7044
dscranton@semitool.com www.pfeifferhigh.com
