SCREWLINE Vacuum Pumps for Pumping Pure Oxygen

Cologne, Germany 2007-03-07

The dry compressing SCREWLINE screw type vacuum pumps are a true alternative for utmost
reliability and safety. Special versions of these pumps are now available for processes involving
increased quantities of oxygen up to 100 percent. The SCREWLINE O2 pump versions attain a
higher level of operational safety. During production and assembly of certain processes, freedom
from hydrocarbons must be ensured widely so as to prevent a self-ignition of organic materials
like oils, greases, and sealing materials when being exposed to increased oxygen

For this reason, only selected materials are used in the manufacture of the SCREWLINE vacuum
pumps qualified for oxygen applications, and the manufacturing process is subject to special
quality assurance measures. In this way it is ensured that the SCREWLINE vacuum pumps can
be employed for the evacuation of gases containing oxygen concentrations of over 21% or even
for pumping of pure oxygen.

As O2 versions, these pumps are equipped as standard with the SCREWLINE monitoring system
and a seal gas monitoring unit. As add-on components, an exhaust silencer and a RUVAC Roots
pump adapter are available. With the RUVAC Roots pumps which are also qualified for pumping
oxygen, complete pump systems can be built.

Further typical areas of application for SCREWLINE O2 pumps can be found for example, in filling
systems for oxygen cylinders, in plasma cleaning, in space technology and research, as well as
in the area of coating technology. Today, commonly oil-sealed pumps using expensive PFPE oil
as the sealant and lubricant are used in these applications. Through the dry compressing
SCREWLINE O2 pumps, the customers can expect a significant savings potential.

For more information contact:
Oerlikon Leybold Vacuum USA Inc.
Mario Vitale
5700 Mellon Road
Export, PA 15632-8900
T +1-800--764-5369
F +1-724-733-1217

Oerlikon - a leading global high-tech corporation
Oerlikon (SWX: OERL) is among the world's most successful industrial high-tech companies focusing on machine and systems
engineering. Oerlikon stands for leading industrial solutions and cutting-edge technology in textile production, thin film coating,
propulsion, precision and vacuum technology. As a company with Swiss roots and a 100-year tradition with CHF 4.8 billion in sales,
over 18,000 employees at 170 locations in 35 countries, Oerlikon has evolved into a global player today. The group is ranked first or
second in each of its respective markets. Oerlikon's share price trebled in 2006 and its market capitalization exceeded the CHF 8 billion
mark, which led to the company's inclusion in the European STOXX 600 Index. Oerlikon was the
best performing stock of the year 2006.

*Aggregated annual turnover in 2006 for the Oerlikon Group (CHF 1.7 billion) and the Saurer Group (CHF 3.1 billion)
Oerlikon Leybold Vacuum offers a broad range of advanced vacuum solutions for use in manufacturing and analytical processes, as
well as for research purposes. The Segment's core capabilities center on the development of application- and customer-specific
systems for the creation of vacuums and extraction of processing gases. Field of application are the semiconductor industry, thin films
and data storage, analytical instruments and the classic industrial processes.

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