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Samsung SDI Chooses LIQUOZON® Dissolved Ozone System for OLED Manufacturing


Wilmington, MA, November 2, 2006 - MKS Instruments, Inc. (Nasdaq: MKSI), a leading provider of process control technologies for improving productivity in semiconductor and other advanced manufacturing processes, is pleased to announce that Samsung SDI, the world leader in OLED technology, has selected MKS' LIQUOZON® dissolved ozone systems for its next generation Organic Light Emitting Diode (OLED) production. The MKS generators were chosen because of their compact size, modular design and unique ability to precisely deliver ultra pure ozonated water for cleaning processes.

"The flat panel display industry faces challenges similar to those of the semiconductor industry. Conventional cleaning methods, with their costly issues of toxic chemical storage, handling, consumption and disposal, pose major problems for manufacturers," said Dr. Christiane Gottschalk, Senior Manager of Sales and Customer Service for ozone products with the MKS Power and Reactive Gas Products Group. "By using ozonated water as the cleaning agent, the LIQUOZON Single system offers a clean, safe alternative with no compromise in process performance or reliability, and significant reductions in waste disposal costs. With such cost and process benefits, ozone delivery systems are gaining wide acceptance in semiconductor and flat panel applications including wet wafer cleaning, contaminant removal and surface conditioning."

The self-contained LIQUOZON Single system generates ultra-pure ozonated water at the point of use, eliminating the need for chemical storage. The system does not generate NOx, a source of contamination and possible chemical attack on metal piping. It delivers exceptionally accurate and high dissolved ozone concentrations (up to 95 ppm), and its closed loop control ensures delivery at stable concentrations, even at varying flow rates. (It is designed and optimized for 0.5 to 20 liters/minute.)
Other ozonated-water delivery systems in the MKS LIQUOZON product family include LIQUOZON LoopO3, the stronger DIO3 systems LIQUOZON Smart and LIQUOZON 100, and the LIQUOZON XF, designed for both cleaning and resist removal in wet applications.

About MKS
MKS Instruments is a leading worldwide provider of process control solutions for advanced manufacturing processes such as semiconductor device manufacturing and thin-film manufacturing for flat panel displays, optical storage media, architectural glass and electro-optical products. We also provide technology for biopharmaceutical and medical imaging equipment.

Our instruments, components and subsystems incorporate sophisticated technologies to power, measure, control and monitor increasingly complex gas-related semiconductor manufacturing processes, thereby enhancing our customers' uptime, yield and throughput, and improving their productivity and return on invested capital.

Corporate contact:
Lisa Condon
Phone: 978-284-4050
Fax: 978-284-4999
Lisa_Condon@mksinst.com

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