Sample Vacuum Chamber enables safe transfer to probe station.

Press Release Summary:



Miniature, transportable sample vacuum chamber can be used for transferring wafer/substrates under vacuum from glove box with special environment into vacuum or cryogenic micro-manipulated probe station (or into vacuum chamber) and back into glove box after testing, measurements, or preparations. Without requiring gate valves, product protects wafer/substrates from atmospheric contamination both on loading and unloading. Typical sizes are 50 mm dia and 25 mm thick.



Original Press Release:



Miniature Transportation Sample Vacuum Chamber for Micro-manipulated Probe Stations



Woburn, Massachusetts — Janis Research Company is pleased to announce that it is offering a patent pending, miniature, transportable sample vacuum chamber capable of maintaining a sample in vacuum during transportation via an atmosphere environment. The vacuum chamber can be used for transferring wafer/substrates under vacuum from a glove box with special environment into a vacuum or cryogenic micro-manipulated probe station (or into a vacuum chamber) and back into the glove box after testing, measurements or preparations. This transportable vacuum chamber protects the wafer/substrates from atmospheric contamination both on loading and unloading.



Unlike a common vacuum load lock the vacuum chamber has the following features.

- typical sizes of 50 mm diameter and 25 mm thickness

- no gate valves required

- very convenient and easy operation

- low cost

- mounting of the transportable sample mount without increasing base temperature of the cryogenic probe station



Contact:

Ann Carroll

Janis Research Company, LLC

225 Wildwood Avenue

Woburn, MA 01801

Phone: +1 781 491-0888, extension 119

www.janis.com/MiniVacuumChamber_PNN.aspx

acarroll@janis.com

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