Rudolph Technologies Expands into LED Market


Leading HB-LED manufacturers worldwide add inspection systems and software to improve
process yields and reduce manufacturing costs

FLANDERS, NJ - Rudolph Technologies, Inc. (NASDAQ: RTEC), a leading provider of process characterization equipment and software that is designed to improve yield for the microelectronics and solar manufacturing industries, announced today that it has expanded into the LED (light emitting diode) market with two significant orders.

Rudolph has shipped its Explorer® Automated Macro Defect Inspection System and Discover Enterprise(TM) Data Analysis Software to a leading world-wide producer of LEDs. In addition, a U.S.-based market leader in LEDs has placed new orders for Rudolph's ProcessWORKS® and ARTIST® process control software, along with repeat orders for AutoShell® factory automation software.

"Rudolph offers a suite of inspection, metrology and data analysis technologies that help high-volume LED makers better understand the causes of defects and yield loss in their front and back-end processes, ultimately lowering manufacturing costs and enhancing the performance and reliability of their products," said Ardy Johnson, Rudolph's marketing vice president. "As the LED industry enters what promises to be a period of rapid expansion, rising costs and increased competition are driving a focus on yield management. This is similar to developments we have seen in semiconductor manufacturing, where the effort to maximize yield has been in place for many years."

Newer, high brightness (HB) LEDs deliver higher performance, but require tighter control of variability and defectivity in the front-end processes, where the LED itself is formed, to ensure process yield and consistent performance of these high-output devices.

Johnson added, "Understanding and improving front-end processes is critical to achieving the performance and reliability required, while maintaining manufacturing costs that allow LED manufacturers to succeed in a very competitive industry."

Rudolph's Explorer System provides automated macro defect inspection of front-end processes, while its NSX® Series enables high-throughput inspection in the back-end. Discover Enterprise software collects and analyzes data from various inspection and metrology sources throughout the process to provide valuable feedback on yield loss and systematic process variation.

"Adding ProcessWORKS, ARTIST and AutoShell to the manufacturing line has demonstrated further improvements to yield with a very high return on investment," said Mike Plisinski, vice president and general manager of Rudolph's Data Analysis and Review Business Unit. "One customer is using the AutoShell systems automation software to connect process tools to their factory systems. They have seen firsthand how AutoShell can reduce errors and improve operator productivity."

Plisinski adds, "As the industry turns its focus from capacity expansions to better yields and tighter process control, software like ARTIST, AutoShell, and ProcessWORKS will become invaluable to LED manufacturing as they are now to the semiconductor industry."

For more information about the full product suite for LED yield and process control, please visit www.rudolphtech.com

Rudolph Technologies, Inc. is a worldwide leader in the development, manufacture and support of defect inspection, process control metrology, and data analysis systems and software used by semiconductor device manufacturers worldwide. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down the costs and time to market of their products. The company's yield management solutions are used in both the wafer processing and final manufacturing of ICs, as well as LEDs and solar. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

Contacts:

Trade Press:

Virginia Becker

952.259.1647

virginia.becker@rudolphtech.com

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