Equipment will focus on the impact of wafer edge process control
FLANDERS, NJ (September 4, 2007)-Rudolph Technologies (NASDAQ:RTEC) announced today it has provided an edge inspection tool to lithography system provider ASML Holding NV (ASML) (Euronext Amsterdam, NASDAQ: ASML) to help characterize wafer defects originating from process control issues at the wafer edge and accentuated by the immersion lithography process.
The Rudolph tool will be used to maximize immersion lithography productivity. The work to characterize the defects of interest will be done at ASML's headquarters in Veldhoven, The Netherlands, and will utilize Rudolph's All-surface Inspection System, including the E25(TM) edge, the AXi(TM) topside, and the B20(TM) backside wafer inspection stations.
The E25(TM) Edge Inspection System uses multiple color cameras along with a novel optics design to capture detailed wafer bevel images. The system uses a recently-enhanced algorithm to create a defect-free surface model-then uses this model to find defects based on their size, color, intensity and location.
Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.