Rudolph Technologies Announces Milestone Shipments of TrueADC Software for Automatic Defect Classification


Installed base exceeds 30 systems; 18 shipped in most recent quarter

Flanders, New Jersey (October 15, 2007)-Rudolph Technologies, Inc.(NASDAQ: RTEC), a leading provider of process characterization solutions for the semiconductor manufacturing industry, today announced that it has seen rapid acceptance of its TrueADC(TM) Software for automatic defect classification. First released in June 2006, the software now has an installed base that exceeds 30 systems, with 18 of those installed in the last quarter at both new and existing customer sites. Rudolph attributes the product's success to its ability to deliver highly accurate classification with minimal training and maintenance. TrueADC is operational at major semiconductor manufacturing facilities worldwide, and in some instances, implemented as a fab-wide process of record.

"Our engineers applied some very creative thinking to the development of this unique product," said Mike Plisinski, general manager of Rudolph's Data Analysis and Review Business Unit. "TrueADC's revolutionary performance is actually based on advanced imaging applications outside the semiconductor industry. Before we introduced TrueADC last year, many of our customers had just about given up on automatic defect classification. Existing products could deliver accuracy only with prohibitively high training and maintenance burdens. TrueADC breaks that link, combining industry-leading speed and accuracy with an easy-to-train, easy-to-extend classification method."

TrueADC software's unique Dynamic Defect Library function easily expands to accommodate new defects or process variations common to most production lines that would normally require expensive engineering involvement. The system is delivered with a defect library created at the factory from customer-supplied images, allowing rapid start-up and nearly immediate return on investment. The initial library is easily augmented with new classifications as they are encountered, permitting virtually unlimited extension with little impact on speed or accuracy and no requirement for complicated reprogramming or additional engineering resources.

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, NJ, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

All Topics