Rudolph Reaches Milestone with 50th AXi System Installation at Korean Memory Manufacturer


FLANDERS, NJ (January 18, 2007)- Rudolph Technologies, Inc. (NASDAQ: RTEC), the leading provider of macro defect inspection systems for the semiconductor manufacturing industry, today announced a milestone 50th installation at a large Korean memory manufacturer for its AXi(TM) 930 Advanced Macro Defect Inspection System. AXi Systems are installed at the chip manufacturer's facilities in Korea as well as North America, and are used at multiple wafer processing steps including memory, logic, and post probe inspection.

"Our first AXi tool was the result of a joint development program that August Technology initiated about four years ago," said Nathan Little, executive vice president and general manager of Rudolph's Inspection Business Unit. "The success of that program led to tool acceptance by this important customer, and ultimately, wide acceptance of the AXi technology by chipmakers around the world."

Rudolph's AXi Macro Inspection System is designed to detect wafer level and die level defects as small as 0.5 microns. Customers in search of high resolution and speed are choosing advanced macro defect inspection tools to drive yield and productivity in multiple wafer processing applications. Advanced macro defect inspection bridges the gap between traditional lower resolution macro inspection tools and the relatively higher cost of ownership (COO) micro inspection tools. The AXi's multiple resolution turret provides the flexibility to perform in both inspection roles. In addition, the system incorporates flexible defect data collection and analysis capability, allowing users to refine defect collection and review defect data on and off the tool.

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

For more information, please contact:

Trade Press:
Virginia Becker
952.259.1647
virginia.becker@rudolphtech.com

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