Rotary Tables suit 300 mm wafer applications.

Press Release Summary:




RotoRing(TM) Series combines RotoLinear(TM) motor technologies and planar air bearings. Tables feature 14 in. diameter center opening to allow access to every die on wafer in die attach and flip-chip applications. Distributed RotoLinear(TM) motor modules provide high positional stiffness to maintain wafer alignment during fast cartesian wafer indexing. Tables offer 30 Nm torque and positioning accuracy of 10 arc-sec (no feedback) and 2 arc-sec (with feedback).



Original Press Release:



Rotary Tables for 300 mm Wafer Applications



Combining RotoLinear(TM) motor technologies and planar air bearings, IntelLiDrives, Inc. implemented RotoRing(TM) Series in the compact, direct drive configuration.

RotoRing(TM) tables feature large 14" diameter center opening to allow access to every die on the wafer in die attach and flip-chip applications.

Unlimited rotation capability allows to perform large angle wafer alignment and to reduce die transfer time by rotating the wafer.

Distributed RotoLinear(TM) motor modules provide high positional stiffness to maintain wafer alignment during fast cartesian wafer indexing.

Technical data:

Torque 30 N*m
Positioning accuracy 10 arc-sec (no feedback)
2 arc-sec (with feedback)
Repeatability 3 arc-sec (no feedback)
1 arc-sec (with feedback)
Run-out < 10 µm (radial and axial)
Load 50 Kg (axial)
10 Kg (radial)
Controls open loop micro-stepping
closed loop with feedback
For additional information contact:

IntelLiDrives, Inc.
8510 Bustleton Ave.
Philadelphia, PA 19152
phone: (215) 728-6804
fax: (215) 745-9459
e-mail: RotoRing@intellidrives.com
web site: www.intellidrives.com

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